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Air-suspended SU-8 strip waveguides with high refractive index contrast

(2016) IEEE PHOTONICS TECHNOLOGY LETTERS. 28(17). p.1862-1865
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Abstract
Integrated polymer photonics is efficient and cheap solution for many applications, such as optical communications and sensors. Waveguides are basic elements of photonic integrated circuits, and their performance directly influences optical circuit efficiency. However, it is a challenge to develop small footprint polymer waveguides with reasonable losses due to low refractive index comparing to cladding. In this letter, we present free-standing SU-8 waveguides with high refractive index contrast. SiO2 cladding is selectively etched, leaving only air as a cladding material; waveguides are supported by thin pillars. Removal of SiO2 cladding eliminates light leakage to substrate and provides better light confinement. Straight and bending SU-8 waveguides are numerically simulated and experimentally verified at λ = 1550 nm. We also report reduced propagation and bending losses in discussed waveguides.
Keywords
Optical losses, Optical waveguides, POLYMER, FABRICATION, Polymers, Propagation losses, Optical device fabrication, Loss measurement, DEVICES, MEMS

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MLA
Marinins, Aleksandrs, et al. “Air-Suspended SU-8 Strip Waveguides with High Refractive Index Contrast.” IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 28, no. 17, 2016, pp. 1862–65, doi:10.1109/LPT.2016.2573960.
APA
Marinins, A., Knudde, N., & Popov, S. (2016). Air-suspended SU-8 strip waveguides with high refractive index contrast. IEEE PHOTONICS TECHNOLOGY LETTERS, 28(17), 1862–1865. https://doi.org/10.1109/LPT.2016.2573960
Chicago author-date
Marinins, Aleksandrs, Nicolas Knudde, and Sergei Popov. 2016. “Air-Suspended SU-8 Strip Waveguides with High Refractive Index Contrast.” IEEE PHOTONICS TECHNOLOGY LETTERS 28 (17): 1862–65. https://doi.org/10.1109/LPT.2016.2573960.
Chicago author-date (all authors)
Marinins, Aleksandrs, Nicolas Knudde, and Sergei Popov. 2016. “Air-Suspended SU-8 Strip Waveguides with High Refractive Index Contrast.” IEEE PHOTONICS TECHNOLOGY LETTERS 28 (17): 1862–1865. doi:10.1109/LPT.2016.2573960.
Vancouver
1.
Marinins A, Knudde N, Popov S. Air-suspended SU-8 strip waveguides with high refractive index contrast. IEEE PHOTONICS TECHNOLOGY LETTERS. 2016;28(17):1862–5.
IEEE
[1]
A. Marinins, N. Knudde, and S. Popov, “Air-suspended SU-8 strip waveguides with high refractive index contrast,” IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 28, no. 17, pp. 1862–1865, 2016.
@article{8059892,
  abstract     = {{Integrated polymer photonics is efficient and cheap solution for many applications, such as optical communications and sensors. Waveguides are basic elements of photonic integrated circuits, and their performance directly influences optical circuit efficiency. However, it is a challenge to develop small footprint polymer waveguides with reasonable losses due to low refractive index comparing to cladding. In this letter, we present free-standing SU-8 waveguides with high refractive index contrast. SiO2 cladding is selectively etched, leaving only air as a cladding material; waveguides are supported by thin pillars. Removal of SiO2 cladding eliminates light leakage to substrate and provides better light confinement. Straight and bending SU-8 waveguides are numerically simulated and experimentally verified at λ = 1550 nm. We also report reduced propagation and bending losses in discussed waveguides.}},
  author       = {{Marinins, Aleksandrs and Knudde, Nicolas and Popov, Sergei}},
  issn         = {{1041-1135}},
  journal      = {{IEEE PHOTONICS TECHNOLOGY LETTERS}},
  keywords     = {{Optical losses,Optical waveguides,POLYMER,FABRICATION,Polymers,Propagation losses,Optical device fabrication,Loss measurement,DEVICES,MEMS}},
  language     = {{eng}},
  number       = {{17}},
  pages        = {{1862--1865}},
  title        = {{Air-suspended SU-8 strip waveguides with high refractive index contrast}},
  url          = {{http://doi.org/10.1109/LPT.2016.2573960}},
  volume       = {{28}},
  year         = {{2016}},
}

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