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Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab

Pieter Dumon (UGent) , Wim Bogaerts (UGent) , Roel Baets (UGent) , J-M Fedeli and L Fulbert
Author
Organization
Abstract
Fabless access to wafer-scale silicon photonics technology is moving silicon photonics closer to becoming a mainstream technology and opens up new exciting areas for research at the same time. It is only by using wafer-scale technology that this emerging field will be able to realise its promise: to become a disruptive technology. At the basis of the rationale for silicon photonics is a complex of photonic functions integrated on a single chip, coupled to a stable, high-yield volume fabrication technology base. ePIXfab is a service platform offering R&D oriented access to state-of-the-art 200 mm wafer-scale CMOS technology optimised for silicon photonics purposes.
Keywords
MODULATOR, ON-INSULATOR, NANOPHOTONIC WAVE-GUIDES

Citation

Please use this url to cite or link to this publication:

Chicago
Dumon, Pieter, Wim Bogaerts, Roel Baets, J-M Fedeli, and L Fulbert. 2009. “Towards Foundry Approach for Silicon Photonics: Silicon Photonics Platform ePIXfab.” Electronics Letters (June): 13–14.
APA
Dumon, P., Bogaerts, W., Baets, R., Fedeli, J.-M., & Fulbert, L. (2009). Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab. ELECTRONICS LETTERS, (June), 13–14.
Vancouver
1.
Dumon P, Bogaerts W, Baets R, Fedeli J-M, Fulbert L. Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab. ELECTRONICS LETTERS. 2009;(June):13–4.
MLA
Dumon, Pieter, Wim Bogaerts, Roel Baets, et al. “Towards Foundry Approach for Silicon Photonics: Silicon Photonics Platform ePIXfab.” ELECTRONICS LETTERS June (2009): 13–14. Print.
@article{784083,
  abstract     = {Fabless access to wafer-scale silicon photonics technology is moving silicon photonics closer to becoming a mainstream technology and opens up new exciting areas for research at the same time. It is only by using wafer-scale technology that this emerging field will be able to realise its promise: to become a disruptive technology. At the basis of the rationale for silicon photonics is a complex of photonic functions integrated on a single chip, coupled to a stable, high-yield volume fabrication technology base. ePIXfab is a service platform offering R\&D oriented access to state-of-the-art 200 mm wafer-scale CMOS technology optimised for silicon photonics purposes.},
  author       = {Dumon, Pieter and Bogaerts, Wim and Baets, Roel and Fedeli, J-M and Fulbert, L},
  issn         = {0013-5194},
  journal      = {ELECTRONICS LETTERS},
  language     = {eng},
  number       = {June},
  pages        = {13--14},
  title        = {Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab},
  url          = {http://dx.doi.org/10.1049/el.2009.1353},
  year         = {2009},
}

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