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In this paper, some modelling approaches to describe direct current (dc) magnetron discharges developed in our research groups will be presented, including an analytical model, Monte Carlo simulations for the electrons and for the sputtered atoms, a hybrid Monte Carlo-fluid model and particle-in-cell-Monte Carlo collision simulations. The strengths and limitations of the various modelling approaches will be explained, and some characteristic simulation results will be illustrated. Furthermore, some other simulation methods related to the magnetron device will be briefly explained, more specifically for calculating the magnetic field distribution inside the discharge, and for describing the (reactive) sputtering.

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Chicago
Bogaerts, Annemie, Evi Bultinck, Ivan Kolev, Laurent Schwaederlé, Koen Van Aeken, Guy Buyle, and Diederik Depla. 2009. “Computer Modelling of Magnetron Discharges.” Journal of Physics D-applied Physics 42: 194018.
APA
Bogaerts, Annemie, Bultinck, E., Kolev, I., Schwaederlé, L., Van Aeken, K., Buyle, G., & Depla, D. (2009). Computer modelling of magnetron discharges. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 42, 194018.
Vancouver
1.
Bogaerts A, Bultinck E, Kolev I, Schwaederlé L, Van Aeken K, Buyle G, et al. Computer modelling of magnetron discharges. JOURNAL OF PHYSICS D-APPLIED PHYSICS. 2009;42:194018.
MLA
Bogaerts, Annemie, Evi Bultinck, Ivan Kolev, et al. “Computer Modelling of Magnetron Discharges.” JOURNAL OF PHYSICS D-APPLIED PHYSICS 42 (2009): 194018. Print.
@article{780917,
  abstract     = {In this paper, some modelling approaches to describe direct current (dc) magnetron discharges developed in our research groups will be presented, including an analytical model, Monte Carlo simulations for the electrons and for the sputtered atoms, a hybrid Monte Carlo-fluid model and particle-in-cell-Monte Carlo collision simulations. The strengths and limitations of the various modelling approaches will be explained, and some characteristic simulation results will be illustrated. Furthermore, some other simulation methods related to the magnetron device will be briefly explained, more specifically for calculating the magnetic field distribution inside the discharge, and for describing the (reactive) sputtering.},
  author       = {Bogaerts, Annemie and Bultinck, Evi and Kolev, Ivan and Schwaederl{\'e}, Laurent and Van Aeken, Koen and Buyle, Guy and Depla, Diederik},
  issn         = {0022-3727},
  journal      = {JOURNAL OF PHYSICS D-APPLIED PHYSICS},
  language     = {eng},
  title        = {Computer modelling of magnetron discharges},
  volume       = {42},
  year         = {2009},
}

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