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A closed-loop digitally controlled MEMS gyroscope with unconstrained Sigma-Delta force-feedback

Johan Raman (UGent) , Edmon Cretu, Pieter Rombouts (UGent) and Ludo Weyten (UGent)
(2009) IEEE SENSORS JOURNAL. 9(3). p.297-305
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Abstract
In this paper, we describe the system architecture and prototype measurements of a MEMS gyroscope system with a resolution of 0.025 degrees/s/root Hz. The architecture makes extensive use of control loops, which are mostly in the digital domain. For the primary mode both the amplitude and the resonance frequency are tracked and controlled. The secondary mode readout is based on unconstrained Sigma Delta force-feedback, which does not require a compensation filter in the loop and thus allows more beneficial quantization noise shaping than prior designs of the same order. Due to the force-feedback, the gyroscope has ample dynamic range to correct the quadrature error in the digital domain. The largely digital setup also gives a lot of flexibility in characterization and testing, where system identification techniques have been used to characterize the sensors. This way, a parasitic direct electrical coupling between actuation and readout of the mass-spring systems was estimated and corrected in the digital domain. Special care is also given to the capacitive readout circuit, which operates in continuous time.
Keywords
ACCELEROMETER, ELECTRONICS, INTERFACE, Sigma Delta force-feedback, MEMS gyroscope, quadrature error compensatiom, Digital control, VIBRATORY GYROSCOPES, MICROMACHINED INERTIAL SENSORS, MODULATION

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Citation

Please use this url to cite or link to this publication:

Chicago
Raman, Johan, Edmon Cretu, Pieter Rombouts, and Ludo Weyten. 2009. “A Closed-loop Digitally Controlled MEMS Gyroscope with Unconstrained Sigma-Delta Force-feedback.” Ieee Sensors Journal 9 (3): 297–305.
APA
Raman, J., Cretu, E., Rombouts, P., & Weyten, L. (2009). A closed-loop digitally controlled MEMS gyroscope with unconstrained Sigma-Delta force-feedback. IEEE SENSORS JOURNAL, 9(3), 297–305.
Vancouver
1.
Raman J, Cretu E, Rombouts P, Weyten L. A closed-loop digitally controlled MEMS gyroscope with unconstrained Sigma-Delta force-feedback. IEEE SENSORS JOURNAL. 2009;9(3):297–305.
MLA
Raman, Johan, Edmon Cretu, Pieter Rombouts, et al. “A Closed-loop Digitally Controlled MEMS Gyroscope with Unconstrained Sigma-Delta Force-feedback.” IEEE SENSORS JOURNAL 9.3 (2009): 297–305. Print.
@article{770852,
  abstract     = {In this paper, we describe the system architecture and prototype measurements of a MEMS gyroscope system with a resolution of 0.025 degrees/s/root Hz. The architecture makes extensive use of control loops, which are mostly in the digital domain. For the primary mode both the amplitude and the resonance frequency are tracked and controlled. The secondary mode readout is based on unconstrained Sigma Delta force-feedback, which does not require a compensation filter in the loop and thus allows more beneficial quantization noise shaping than prior designs of the same order. Due to the force-feedback, the gyroscope has ample dynamic range to correct the quadrature error in the digital domain. The largely digital setup also gives a lot of flexibility in characterization and testing, where system identification techniques have been used to characterize the sensors. This way, a parasitic direct electrical coupling between actuation and readout of the mass-spring systems was estimated and corrected in the digital domain. Special care is also given to the capacitive readout circuit, which operates in continuous time.},
  author       = {Raman, Johan and Cretu, Edmon and Rombouts, Pieter and Weyten, Ludo},
  issn         = {1530-437X},
  journal      = {IEEE SENSORS JOURNAL},
  language     = {eng},
  number       = {3},
  pages        = {297--305},
  title        = {A closed-loop digitally controlled MEMS gyroscope with unconstrained Sigma-Delta force-feedback},
  url          = {http://dx.doi.org/10.1109/JSEN.2008.2012237},
  volume       = {9},
  year         = {2009},
}

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