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In situ study of the formation of silicide phases in amorphous Co-Si mixed layers

(2010) MICROELECTRONIC ENGINEERING. 87(3). p.282-285
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Keywords
Nucleation, Cobalt silicides, Grain size, In situ XRD, EBSD, MIXING ENTROPY, NUCLEATION, COSI2

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Citation

Please use this url to cite or link to this publication:

Chicago
Van Bockstael, Charlotte, Koen De Keyser, Jelle Demeulemeester, André Vantomme, Roland Vanmeirhaeghe, Christophe Detavernier, Jean Jordan-Sweet, and Christian Lavoie. 2010. “In Situ Study of the Formation of Silicide Phases in Amorphous Co-Si Mixed Layers.” Microelectronic Engineering 87 (3): 282–285.
APA
Van Bockstael, C., De Keyser, K., Demeulemeester, J., Vantomme, A., Vanmeirhaeghe, R., Detavernier, C., Jordan-Sweet, J., et al. (2010). In situ study of the formation of silicide phases in amorphous Co-Si mixed layers. MICROELECTRONIC ENGINEERING, 87(3), 282–285. Presented at the 18th European Workshop on Materials for Advanced Metallization.
Vancouver
1.
Van Bockstael C, De Keyser K, Demeulemeester J, Vantomme A, Vanmeirhaeghe R, Detavernier C, et al. In situ study of the formation of silicide phases in amorphous Co-Si mixed layers. MICROELECTRONIC ENGINEERING. 2010;87(3):282–5.
MLA
Van Bockstael, Charlotte, Koen De Keyser, Jelle Demeulemeester, et al. “In Situ Study of the Formation of Silicide Phases in Amorphous Co-Si Mixed Layers.” MICROELECTRONIC ENGINEERING 87.3 (2010): 282–285. Print.
@article{759405,
  author       = {Van Bockstael, Charlotte and De Keyser, Koen and Demeulemeester, Jelle and Vantomme, Andr{\'e} and Vanmeirhaeghe, Roland and Detavernier, Christophe and Jordan-Sweet, Jean and Lavoie, Christian},
  issn         = {0167-9317},
  journal      = {MICROELECTRONIC ENGINEERING},
  keyword      = {Nucleation,Cobalt silicides,Grain size,In situ XRD,EBSD,MIXING ENTROPY,NUCLEATION,COSI2},
  language     = {eng},
  location     = {Grenoble, France},
  number       = {3},
  pages        = {282--285},
  title        = {In situ study of the formation of silicide phases in amorphous Co-Si mixed layers},
  url          = {http://dx.doi.org/10.1016/j.mee.2009.07.011},
  volume       = {87},
  year         = {2010},
}

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