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Scalable electro-photonic integration concept based on polymer waveguides

Erwin Bosman, Geert Van Steenberge UGent, Arjen Boersma, Sjoukje Wiegersma, Peter Harsma, Mikko Karppinen, Tia Korhonen, Bert-Jan Offrein, Roger Dangel, Aidan Daly, et al. (2016) Proceedings of SPIE. 9753.
abstract
A novel method for fabricating a single mode optical interconnection platform is presented. The method comprises the miniaturized assembly of optoelectronic single dies, the scalable fabrication of polymer single mode waveguides and the coupling to glass fiber arrays providing the I/O's. The low cost approach for the polymer waveguide fabrication is based on the nano-imprinting of a spincoated waveguide core layer. The assembly of VCSELs and photodiodes is performed before waveguide layers are applied. By embedding these components in deep reactive ion etched pockets in the silicon substrate, the planarity of the substrate for subsequent layer processing is guaranteed and the thermal path of chip-to-substrate is minimized. Optical coupling of the embedded devices to the nano-imprinted waveguides is performed by laser ablating 45 degree trenches which act as optical mirror for 90 degree deviation of the light from VCSEL to waveguide. Laser ablation is also implemented for removing parts of the polymer stack in order to mount a custom fabricated connector containing glass fiber arrays. A demonstration device was built to show the proof of principle of the novel fabrication, packaging and optical coupling principles as described above, combined with a set of sub-demonstrators showing the functionality of the different techniques separately. The paper represents a significant part of the electro-photonic integration accomplishments in the European 7th Framework project "Firefly" and not only discusses the development of the different assembly processes described above, but the efforts on the complete integration of all process approaches into the single device demonstrator.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (proceedingsPaper)
publication status
published
subject
keyword
photonic integration, nano-imprinting, fiber-coupling, micromirror, polymer waveguides
in
Proceedings of SPIE
volume
9753
issue title
OPTICAL INTERCONNECTS XVI
article number
97530G
pages
8 pages
publisher
SPIE Proceedings
conference name
Conference on Optical Interconnects XVI
conference location
San Francisco, California, United States
conference start
2016-02-15
conference end
2016-02-17
Web of Science type
Proceedings Paper
Web of Science id
000377658000011
ISSN
0277-786X
ISBN
978-1-62841-988-7
DOI
10.1117/12.2225304
project
EU FP7 Firefly
language
English
UGent publication?
yes
classification
P1
copyright statement
I have transferred the copyright for this publication to the publisher
id
7245389
handle
http://hdl.handle.net/1854/LU-7245389
date created
2016-06-07 11:13:04
date last changed
2016-12-21 15:41:00
@inproceedings{7245389,
  abstract     = {A novel method for fabricating a single mode optical interconnection platform is presented. The method comprises the miniaturized assembly of optoelectronic single dies, the scalable fabrication of polymer single mode waveguides and the coupling to glass fiber arrays providing the I/O's. 

The low cost approach for the polymer waveguide fabrication is based on the nano-imprinting of a spincoated waveguide core layer. The assembly of VCSELs and photodiodes is performed before waveguide layers are applied. By embedding these components in deep reactive ion etched pockets in the silicon substrate, the planarity of the substrate for subsequent layer processing is guaranteed and the thermal path of chip-to-substrate is minimized. 

Optical coupling of the embedded devices to the nano-imprinted waveguides is performed by laser ablating 45 degree trenches which act as optical mirror for 90 degree deviation of the light from VCSEL to waveguide. Laser ablation is also implemented for removing parts of the polymer stack in order to mount a custom fabricated connector containing glass fiber arrays. 

A demonstration device was built to show the proof of principle of the novel fabrication, packaging and optical coupling principles as described above, combined with a set of sub-demonstrators showing the functionality of the different techniques separately. 

The paper represents a significant part of the electro-photonic integration accomplishments in the European 7th Framework project {\textacutedbl}Firefly{\textacutedbl} and not only discusses the development of the different assembly processes described above, but the efforts on the complete integration of all process approaches into the single device demonstrator.},
  articleno    = {97530G},
  author       = {Bosman, Erwin and Van Steenberge, Geert and Boersma, Arjen and Wiegersma, Sjoukje  and Harsma, Peter and Karppinen, Mikko and Korhonen, Tia and Offrein, Bert-Jan and Dangel, Roger and Daly, Aidan and Ortsiefer, Markus},
  booktitle    = {Proceedings of SPIE},
  isbn         = {978-1-62841-988-7},
  issn         = {0277-786X},
  keyword      = {photonic integration,nano-imprinting,fiber-coupling,micromirror,polymer waveguides},
  language     = {eng},
  location     = {San Francisco, California, United States},
  pages        = {8},
  publisher    = {SPIE Proceedings},
  title        = {Scalable electro-photonic integration concept based on polymer waveguides},
  url          = {http://dx.doi.org/10.1117/12.2225304},
  volume       = {9753},
  year         = {2016},
}

Chicago
Bosman, Erwin, Geert Van Steenberge, Arjen Boersma, Sjoukje Wiegersma, Peter Harsma, Mikko Karppinen, Tia Korhonen, et al. 2016. “Scalable Electro-photonic Integration Concept Based on Polymer Waveguides.” In Proceedings of SPIE. Vol. 9753. SPIE Proceedings.
APA
Bosman, E., Van Steenberge, G., Boersma, A., Wiegersma, S., Harsma, P., Karppinen, M., Korhonen, T., et al. (2016). Scalable electro-photonic integration concept based on polymer waveguides. Proceedings of SPIE (Vol. 9753). Presented at the Conference on Optical Interconnects XVI, SPIE Proceedings.
Vancouver
1.
Bosman E, Van Steenberge G, Boersma A, Wiegersma S, Harsma P, Karppinen M, et al. Scalable electro-photonic integration concept based on polymer waveguides. Proceedings of SPIE. SPIE Proceedings; 2016.
MLA
Bosman, Erwin, Geert Van Steenberge, Arjen Boersma, et al. “Scalable Electro-photonic Integration Concept Based on Polymer Waveguides.” Proceedings of SPIE. Vol. 9753. SPIE Proceedings, 2016. Print.