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Sputter deposition of Ce(Sm,Y)O2 thin films : linking phase instability to grain size

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Abstract
(1 - x)CeO2 - xMO(1.5) thin films (with M = Y or Sm) were deposited using DC reactive dual magnetron sputtering. The influence of the substitution of Ce4+ ions by M3+ ions in the ceria fluorite structure is investigated with x-ray diffraction and scanning electron microscopy to provide a description of the thin film microstructural and textural evolution at room temperature and at elevated temperatures. Phase analysis shows that the fluorite structure can be maintained until a composition of x = 0.40 of Y or Sm. At higher values of x, a diphasic region is observed. The films are thermally stable because no restructuring occurs when they are heated. A decrease in grain size is observed before the diphasic region forms which is typically explained from a reduced adatom mobility. However, the microstructure throughout the composition range is indicative of zone T growth. These findings illustrate that while the growth of a thin film is a kinetically driven process, the observed decrease in grain size is no evidence of a reduced surface adatom mobility but of imposed thermodynamic barriers. The critical composition for the grain size change coincides not only for both material systems (M = Y or Sm), but also with reported values of crystallographic structural changes in bulk material.
Keywords
rare earth oxide solid solutions, reactive sputter deposition, thin film growth, surface adatom mobility, phase instability, YTTRIA-DOPED CERIA, X-RAY-DIFFRACTION, OXIDE FUEL-CELLS, SOLID-SOLUTIONS, LATTICE-PARAMETERS, IONIC-CONDUCTIVITY, SUBSTRATE-TEMPERATURE, ELECTRICAL-PROPERTIES, ELECTROLYTES, SYSTEM

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Chicago
Van Steenberge, Sigelinde, and Diederik Depla. 2016. “Sputter Deposition of Ce(Sm,Y)O2 Thin Films : Linking Phase Instability to Grain Size.” Journal of Physics D-applied Physics 49 (24).
APA
Van Steenberge, S., & Depla, D. (2016). Sputter deposition of Ce(Sm,Y)O2 thin films : linking phase instability to grain size. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 49(24).
Vancouver
1.
Van Steenberge S, Depla D. Sputter deposition of Ce(Sm,Y)O2 thin films : linking phase instability to grain size. JOURNAL OF PHYSICS D-APPLIED PHYSICS. 2016;49(24).
MLA
Van Steenberge, Sigelinde, and Diederik Depla. “Sputter Deposition of Ce(Sm,Y)O2 Thin Films : Linking Phase Instability to Grain Size.” JOURNAL OF PHYSICS D-APPLIED PHYSICS 49.24 (2016): n. pag. Print.
@article{7208922,
  abstract     = {(1 - x)CeO2 - xMO(1.5) thin films (with M = Y or Sm) were deposited using DC reactive dual magnetron sputtering. The influence of the substitution of Ce4+ ions by M3+ ions in the ceria fluorite structure is investigated with x-ray diffraction and scanning electron microscopy to provide a description of the thin film microstructural and textural evolution at room temperature and at elevated temperatures. Phase analysis shows that the fluorite structure can be maintained until a composition of x = 0.40 of Y or Sm. At higher values of x, a diphasic region is observed. The films are thermally stable because no restructuring occurs when they are heated. A decrease in grain size is observed before the diphasic region forms which is typically explained from a reduced adatom mobility. However, the microstructure throughout the composition range is indicative of zone T growth. These findings illustrate that while the growth of a thin film is a kinetically driven process, the observed decrease in grain size is no evidence of a reduced surface adatom mobility but of imposed thermodynamic barriers. The critical composition for the grain size change coincides not only for both material systems (M = Y or Sm), but also with reported values of crystallographic structural changes in bulk material.},
  articleno    = {245302},
  author       = {Van Steenberge, Sigelinde and Depla, Diederik},
  issn         = {0022-3727},
  journal      = {JOURNAL OF PHYSICS D-APPLIED PHYSICS},
  language     = {eng},
  number       = {24},
  pages        = {11},
  title        = {Sputter deposition of Ce(Sm,Y)O2 thin films : linking phase instability to grain size},
  url          = {http://dx.doi.org/10.1088/0022-3727/49/24/245302},
  volume       = {49},
  year         = {2016},
}

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