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Hysteresis behavior during facing target magnetron sputtering

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Keywords
Facing target sputtering, Hysteresis, Reactive magnetron sputtering, Modelling, OXIDE THIN-FILMS, ELECTRICAL-PROPERTIES, LOW-TEMPERATURE, SYSTEM, DEPOSITION, DISCHARGE, COMBINATORIAL, EROSION, PLASMA

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Citation

Please use this url to cite or link to this publication:

MLA
Cougnon, Florian et al. “Hysteresis Behavior During Facing Target Magnetron Sputtering.” SURFACE & COATINGS TECHNOLOGY 294 (2016): 215–219. Print.
APA
Cougnon, F., Strijckmans, K., Schelfhout, R., & Depla, D. (2016). Hysteresis behavior during facing target magnetron sputtering. SURFACE & COATINGS TECHNOLOGY, 294, 215–219.
Chicago author-date
Cougnon, Florian, Koen Strijckmans, Roeland Schelfhout, and Diederik Depla. 2016. “Hysteresis Behavior During Facing Target Magnetron Sputtering.” Surface & Coatings Technology 294: 215–219.
Chicago author-date (all authors)
Cougnon, Florian, Koen Strijckmans, Roeland Schelfhout, and Diederik Depla. 2016. “Hysteresis Behavior During Facing Target Magnetron Sputtering.” Surface & Coatings Technology 294: 215–219.
Vancouver
1.
Cougnon F, Strijckmans K, Schelfhout R, Depla D. Hysteresis behavior during facing target magnetron sputtering. SURFACE & COATINGS TECHNOLOGY. 2016;294:215–9.
IEEE
[1]
F. Cougnon, K. Strijckmans, R. Schelfhout, and D. Depla, “Hysteresis behavior during facing target magnetron sputtering,” SURFACE & COATINGS TECHNOLOGY, vol. 294, pp. 215–219, 2016.
@article{7180028,
  author       = {{Cougnon, Florian and Strijckmans, Koen and Schelfhout, Roeland and Depla, Diederik}},
  issn         = {{0257-8972}},
  journal      = {{SURFACE & COATINGS TECHNOLOGY}},
  keywords     = {{Facing target sputtering,Hysteresis,Reactive magnetron sputtering,Modelling,OXIDE THIN-FILMS,ELECTRICAL-PROPERTIES,LOW-TEMPERATURE,SYSTEM,DEPOSITION,DISCHARGE,COMBINATORIAL,EROSION,PLASMA}},
  language     = {{eng}},
  pages        = {{215--219}},
  title        = {{Hysteresis behavior during facing target magnetron sputtering}},
  url          = {{http://dx.doi.org/10.1016/j.surfcoat.2016.03.096}},
  volume       = {{294}},
  year         = {{2016}},
}

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