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Study of Ni-germanide phase formation in Ge(001) with Pd or Pt interlayer

Sérgio MC Miranda, Filip Geenen UGent, Christophe Detavernier UGent, Kristiaan Temst and André Vantomme (2015) 2015 IEEE International Interconnect Technology conference and 2015 IEEE Materials for Advanced Metallization conference (IITC/MAM), Abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
2015 IEEE International Interconnect Technology conference and 2015 IEEE Materials for Advanced Metallization conference (IITC/MAM), Abstracts
conference name
2015 IEEE International Interconnect Technology conference and 2015 IEEE Materials for Advanced Metallization conference (IITC/MAM)
conference location
Grenoble, France
conference start
2015-05-18
conference end
2015-05-21
language
English
UGent publication?
yes
classification
C3
id
7063999
handle
http://hdl.handle.net/1854/LU-7063999
date created
2016-01-31 08:23:56
date last changed
2016-12-19 15:37:14
@inproceedings{7063999,
  author       = {Miranda, S{\'e}rgio MC and Geenen, Filip and Detavernier, Christophe and Temst, Kristiaan and Vantomme, Andr{\'e}},
  booktitle    = {2015 IEEE International Interconnect Technology conference and 2015 IEEE Materials for Advanced Metallization conference (IITC/MAM), Abstracts},
  language     = {eng},
  location     = {Grenoble, France},
  title        = {Study of Ni-germanide phase formation in Ge(001) with Pd or Pt interlayer},
  year         = {2015},
}

Chicago
Miranda, Sérgio MC, Filip Geenen, Christophe Detavernier, Kristiaan Temst, and André Vantomme. 2015. “Study of Ni-germanide Phase Formation in Ge(001) with Pd or Pt Interlayer.” In 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), Abstracts.
APA
Miranda, S. M., Geenen, F., Detavernier, C., Temst, K., & Vantomme, A. (2015). Study of Ni-germanide phase formation in Ge(001) with Pd or Pt interlayer. 2015 IEEE International Interconnect Technology conference and 2015 IEEE Materials for Advanced Metallization conference (IITC/MAM), Abstracts. Presented at the 2015 IEEE International Interconnect Technology conference and 2015 IEEE Materials for Advanced Metallization conference (IITC/MAM).
Vancouver
1.
Miranda SM, Geenen F, Detavernier C, Temst K, Vantomme A. Study of Ni-germanide phase formation in Ge(001) with Pd or Pt interlayer. 2015 IEEE International Interconnect Technology conference and 2015 IEEE Materials for Advanced Metallization conference (IITC/MAM), Abstracts. 2015.
MLA
Miranda, Sérgio MC, Filip Geenen, Christophe Detavernier, et al. “Study of Ni-germanide Phase Formation in Ge(001) with Pd or Pt Interlayer.” 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), Abstracts. 2015. Print.