Advanced search
2 files | 2.60 MB

Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry

(2015) OPTICS LETTERS. 40(22). p.5371-5374
Author
Organization
Project
Center for nano- and biophotonics (NB-Photonics)
Keywords
2ND-HARMONIC GENERATION, OXIDE THIN-FILMS, HARMONIC-GENERATION, PRECURSORS, SURFACE, SILICA, ALD

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 1.41 MB
  • pub 1798a.pdf
    • full text
    • |
    • open access
    • |
    • PDF
    • |
    • 1.19 MB

Citation

Please use this url to cite or link to this publication:

Chicago
Clemmen, Stéphane, Artur Hermans, Eduardo Solano Minuesa, Jolien Dendooven, Kalle Koskinen, Martti Kauranen, Edouard Brainis, Christophe Detavernier, and Roel Baets. 2015. “Atomic Layer Deposited Second-order Nonlinear Optical Metamaterial for Back-end Integration with CMOS-compatible Nanophotonic Circuitry.” Optics Letters 40 (22): 5371–5374.
APA
Clemmen, Stéphane, Hermans, A., Solano Minuesa, E., Dendooven, J., Koskinen, K., Kauranen, M., Brainis, E., et al. (2015). Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry. OPTICS LETTERS, 40(22), 5371–5374.
Vancouver
1.
Clemmen S, Hermans A, Solano Minuesa E, Dendooven J, Koskinen K, Kauranen M, et al. Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry. OPTICS LETTERS. 2015;40(22):5371–4.
MLA
Clemmen, Stéphane et al. “Atomic Layer Deposited Second-order Nonlinear Optical Metamaterial for Back-end Integration with CMOS-compatible Nanophotonic Circuitry.” OPTICS LETTERS 40.22 (2015): 5371–5374. Print.
@article{7048102,
  author       = {Clemmen, St{\'e}phane and Hermans, Artur and Solano Minuesa, Eduardo and Dendooven, Jolien and Koskinen, Kalle and Kauranen, Martti and Brainis, Edouard and Detavernier, Christophe and Baets, Roel},
  issn         = {0146-9592},
  journal      = {OPTICS LETTERS},
  language     = {eng},
  number       = {22},
  pages        = {5371--5374},
  title        = {Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry},
  url          = {http://dx.doi.org/10.1364/OL.40.005371},
  volume       = {40},
  year         = {2015},
}

Altmetric
View in Altmetric
Web of Science
Times cited: