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The influence of the pressure on the microstructure of yttria-stabilized zirconia thin films deposited by dual magnetron sputtering

(2016) VACUUM. 125. p.118-122
Author
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Keywords
Yttria-stabilized zirconia, Dual magnetron sputtering, Modelling, Monte Carlo, GROWTH

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Citation

Please use this url to cite or link to this publication:

MLA
Depla, Diederik, A Besnard, and Jérika Suely Lamas. “The Influence of the Pressure on the Microstructure of Yttria-stabilized Zirconia Thin Films Deposited by Dual Magnetron Sputtering.” VACUUM 125 (2016): 118–122. Print.
APA
Depla, D., Besnard, A., & Lamas, J. S. (2016). The influence of the pressure on the microstructure of yttria-stabilized zirconia thin films deposited by dual magnetron sputtering. VACUUM, 125, 118–122.
Chicago author-date
Depla, Diederik, A Besnard, and Jérika Suely Lamas. 2016. “The Influence of the Pressure on the Microstructure of Yttria-stabilized Zirconia Thin Films Deposited by Dual Magnetron Sputtering.” Vacuum 125: 118–122.
Chicago author-date (all authors)
Depla, Diederik, A Besnard, and Jérika Suely Lamas. 2016. “The Influence of the Pressure on the Microstructure of Yttria-stabilized Zirconia Thin Films Deposited by Dual Magnetron Sputtering.” Vacuum 125: 118–122.
Vancouver
1.
Depla D, Besnard A, Lamas JS. The influence of the pressure on the microstructure of yttria-stabilized zirconia thin films deposited by dual magnetron sputtering. VACUUM. 2016;125:118–22.
IEEE
[1]
D. Depla, A. Besnard, and J. S. Lamas, “The influence of the pressure on the microstructure of yttria-stabilized zirconia thin films deposited by dual magnetron sputtering,” VACUUM, vol. 125, pp. 118–122, 2016.
@article{7023730,
  author       = {Depla, Diederik and Besnard, A and Lamas, Jérika Suely},
  issn         = {0042-207X},
  journal      = {VACUUM},
  keywords     = {Yttria-stabilized zirconia,Dual magnetron sputtering,Modelling,Monte Carlo,GROWTH},
  language     = {eng},
  pages        = {118--122},
  title        = {The influence of the pressure on the microstructure of yttria-stabilized zirconia thin films deposited by dual magnetron sputtering},
  url          = {http://dx.doi.org/10.1016/j.vacuum.2015.12.013},
  volume       = {125},
  year         = {2016},
}

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