
Impact of the gate material on the deep levels in a-Si:H/c-Si Metal-Insulator-Semiconductor capacitors
- Author
- Eddy Simoen (UGent) , Valentina Ferro and Barry O'Sullivan
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-6942690
- MLA
- Simoen, Eddy, Valentina Ferro, and Barry O’Sullivan. “Impact of the Gate Material on the Deep Levels in a-Si:H/c-Si Metal-Insulator-Semiconductor Capacitors.” Solid State Phenomena. Ed. P Pichler. Vol. 242. Stafa-Zürich, Switzerland: Trans Tech, 2016. 61–66. Print.
- APA
- Simoen, Eddy, Ferro, V., & O’Sullivan, B. (2016). Impact of the gate material on the deep levels in a-Si:H/c-Si Metal-Insulator-Semiconductor capacitors. In P. Pichler (Ed.), Solid State Phenomena (Vol. 242, pp. 61–66). Presented at the Gettering and Defect Engineering in Semiconductor Technology 2015 (GADEST 2015): 30 Years of GADEST, Stafa-Zürich, Switzerland: Trans Tech.
- Chicago author-date
- Simoen, Eddy, Valentina Ferro, and Barry O’Sullivan. 2016. “Impact of the Gate Material on the Deep Levels in a-Si:H/c-Si Metal-Insulator-Semiconductor Capacitors.” In Solid State Phenomena, ed. P Pichler, 242:61–66. Stafa-Zürich, Switzerland: Trans Tech.
- Chicago author-date (all authors)
- Simoen, Eddy, Valentina Ferro, and Barry O’Sullivan. 2016. “Impact of the Gate Material on the Deep Levels in a-Si:H/c-Si Metal-Insulator-Semiconductor Capacitors.” In Solid State Phenomena, ed. P Pichler, 242:61–66. Stafa-Zürich, Switzerland: Trans Tech.
- Vancouver
- 1.Simoen E, Ferro V, O’Sullivan B. Impact of the gate material on the deep levels in a-Si:H/c-Si Metal-Insulator-Semiconductor capacitors. In: Pichler P, editor. Solid State Phenomena. Stafa-Zürich, Switzerland: Trans Tech; 2016. p. 61–6.
- IEEE
- [1]E. Simoen, V. Ferro, and B. O’Sullivan, “Impact of the gate material on the deep levels in a-Si:H/c-Si Metal-Insulator-Semiconductor capacitors,” in Solid State Phenomena, Bad Staffelstein, Germany, 2016, vol. 242, pp. 61–66.
@inproceedings{6942690, author = {Simoen, Eddy and Ferro, Valentina and O'Sullivan, Barry}, booktitle = {Solid State Phenomena}, editor = {Pichler, P}, isbn = {9783038356080}, issn = {1012-0394}, language = {eng}, location = {Bad Staffelstein, Germany}, pages = {61--66}, publisher = {Trans Tech}, title = {Impact of the gate material on the deep levels in a-Si:H/c-Si Metal-Insulator-Semiconductor capacitors}, url = {http://dx.doi.org/10.4028/www.scientific.net/SSP.242.61}, volume = {242}, year = {2016}, }
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