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Reverse replication of circular micro grating structures with soft lithography

(2015) Proceedings of SPIE. 9661. p.96610V-1-96610V-7
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Organization
Project
G.A047.11N
Project
IWT-nr 120019
Abstract
In this work, the reverse replication of circular micro grating structures on glass substrates is implemented using an ultra-violet curable resin and a polydimethylsiloxane (PDMS) mold which has the same structure as the original circular grating master. Two different techniques ("double PDMS replication" and "polymer-PDMS replication") are employed to fabricate those reversed circular micro grating structures. Surface profiling measurements show that in case of the polymer-PDMS replication the dimensions of the resulting circular grating structures closely approximate those of the master, while the grating height is slightly decreased in case of the double PDMS replication technique, mainly due to the use of the releasing agent. For both methods, the grating slopes of the circular gratings are almost unchanged, leading to the desired optical performance. The two techniques are quite useful for more accurate reverse replications of micro optical and photonic structures.
Keywords
PDMS molding, UV curable resins, soft lithography, light steering., reverse replication

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Citation

Please use this url to cite or link to this publication:

Chicago
Shang, Xiaobing, Jeroen Missinne, Nuria Teigell Beneitez, Michal Jablonski, Jelle De Smet, Pankaj Joshi, Dieter Cuypers, et al. 2015. “Reverse Replication of Circular Micro Grating Structures with Soft Lithography.” In Proceedings of SPIE, 9661:96610V–1–96610V–7. SPIE.
APA
Shang, X., Missinne, J., Teigell Beneitez, N., Jablonski, M., De Smet, J., Joshi, P., Cuypers, D., et al. (2015). Reverse replication of circular micro grating structures with soft lithography. Proceedings of SPIE (Vol. 9661, pp. 96610V–1–96610V–7). Presented at the 31st European Mask and Lithography Conference (EMLC), SPIE.
Vancouver
1.
Shang X, Missinne J, Teigell Beneitez N, Jablonski M, De Smet J, Joshi P, et al. Reverse replication of circular micro grating structures with soft lithography. Proceedings of SPIE. SPIE; 2015. p. 96610V–1–96610V–7.
MLA
Shang, Xiaobing, Jeroen Missinne, Nuria Teigell Beneitez, et al. “Reverse Replication of Circular Micro Grating Structures with Soft Lithography.” Proceedings of SPIE. Vol. 9661. SPIE, 2015. 96610V–1–96610V–7. Print.
@inproceedings{6926728,
  abstract     = {In this work, the reverse replication of circular micro grating structures on glass substrates is implemented using an ultra-violet curable resin and a polydimethylsiloxane (PDMS) mold which has the same structure as the original circular grating master. Two different techniques ({\textacutedbl}double PDMS replication{\textacutedbl} and {\textacutedbl}polymer-PDMS replication{\textacutedbl}) are employed to fabricate those reversed circular micro grating structures. Surface profiling measurements show that in case of the polymer-PDMS replication the dimensions of the resulting circular grating structures closely approximate those of the master, while the grating height is slightly decreased in case of the double PDMS replication technique, mainly due to the use of the releasing agent. For both methods, the grating slopes of the circular gratings are almost unchanged, leading to the desired optical performance. The two techniques are quite useful for more accurate reverse replications of micro optical and photonic structures.},
  articleno    = {96610V},
  author       = {Shang, Xiaobing and Missinne, Jeroen and Teigell Beneitez, Nuria and Jablonski, Michal and De Smet, Jelle and Joshi, Pankaj and Cuypers, Dieter and Baghdasaryan, Tigran  and Vervaeke, Michael  and Thienpont, Hugo and De Smet, Herbert},
  booktitle    = {Proceedings of SPIE},
  isbn         = {978-1-62841-879-8},
  issn         = {0277-786X},
  language     = {eng},
  location     = {Eindhoven, The Netherlands},
  pages        = {96610V:96610V-1--96610V:96610V-7},
  publisher    = {SPIE},
  title        = {Reverse replication of circular micro grating structures with soft lithography},
  url          = {http://dx.doi.org/10.1117/12.2194351},
  volume       = {9661},
  year         = {2015},
}

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