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Reverse replication of circular micro grating structures with soft lithography

(2015) Proceedings of SPIE. 9661. p.96610V-1-96610V-7
Author
Organization
Project
G.A047.11N
Project
IWT-nr 120019
Abstract
In this work, the reverse replication of circular micro grating structures on glass substrates is implemented using an ultra-violet curable resin and a polydimethylsiloxane (PDMS) mold which has the same structure as the original circular grating master. Two different techniques ("double PDMS replication" and "polymer-PDMS replication") are employed to fabricate those reversed circular micro grating structures. Surface profiling measurements show that in case of the polymer-PDMS replication the dimensions of the resulting circular grating structures closely approximate those of the master, while the grating height is slightly decreased in case of the double PDMS replication technique, mainly due to the use of the releasing agent. For both methods, the grating slopes of the circular gratings are almost unchanged, leading to the desired optical performance. The two techniques are quite useful for more accurate reverse replications of micro optical and photonic structures.
Keywords
PDMS molding, UV curable resins, soft lithography, light steering., reverse replication

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Citation

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MLA
Shang, Xiaobing, et al. “Reverse Replication of Circular Micro Grating Structures with Soft Lithography.” Proceedings of SPIE, vol. 9661, SPIE, 2015, pp. 96610V-1-96610V – 7.
APA
Shang, X., Missinne, J., Teigell Beneitez, N., Jablonski, M., De Smet, J., Joshi, P., … De Smet, H. (2015). Reverse replication of circular micro grating structures with soft lithography. In Proceedings of SPIE (Vol. 9661, pp. 96610V-1-96610V – 7). Eindhoven, The Netherlands: SPIE.
Chicago author-date
Shang, Xiaobing, Jeroen Missinne, Nuria Teigell Beneitez, Michal Jablonski, Jelle De Smet, Pankaj Joshi, Dieter Cuypers, et al. 2015. “Reverse Replication of Circular Micro Grating Structures with Soft Lithography.” In Proceedings of SPIE, 9661:96610V-1-96610V – 7. SPIE.
Chicago author-date (all authors)
Shang, Xiaobing, Jeroen Missinne, Nuria Teigell Beneitez, Michal Jablonski, Jelle De Smet, Pankaj Joshi, Dieter Cuypers, Tigran Baghdasaryan, Michael Vervaeke, Hugo Thienpont, and Herbert De Smet. 2015. “Reverse Replication of Circular Micro Grating Structures with Soft Lithography.” In Proceedings of SPIE, 9661:96610V-1-96610V–7. SPIE.
Vancouver
1.
Shang X, Missinne J, Teigell Beneitez N, Jablonski M, De Smet J, Joshi P, et al. Reverse replication of circular micro grating structures with soft lithography. In: Proceedings of SPIE. SPIE; 2015. p. 96610V-1-96610V – 7.
IEEE
[1]
X. Shang et al., “Reverse replication of circular micro grating structures with soft lithography,” in Proceedings of SPIE, Eindhoven, The Netherlands, 2015, vol. 9661, pp. 96610V-1-96610V–7.
@inproceedings{6926728,
  abstract     = {In this work, the reverse replication of circular micro grating structures on glass substrates is implemented using an ultra-violet curable resin and a polydimethylsiloxane (PDMS) mold which has the same structure as the original circular grating master. Two different techniques ("double PDMS replication" and "polymer-PDMS replication") are employed to fabricate those reversed circular micro grating structures. Surface profiling measurements show that in case of the polymer-PDMS replication the dimensions of the resulting circular grating structures closely approximate those of the master, while the grating height is slightly decreased in case of the double PDMS replication technique, mainly due to the use of the releasing agent. For both methods, the grating slopes of the circular gratings are almost unchanged, leading to the desired optical performance. The two techniques are quite useful for more accurate reverse replications of micro optical and photonic structures.},
  articleno    = {96610V},
  author       = {Shang, Xiaobing and Missinne, Jeroen and Teigell Beneitez, Nuria and Jablonski, Michal and De Smet, Jelle and Joshi, Pankaj and Cuypers, Dieter and Baghdasaryan, Tigran and Vervaeke, Michael and Thienpont, Hugo and De Smet, Herbert},
  booktitle    = {Proceedings of SPIE},
  isbn         = {978-1-62841-879-8},
  issn         = {0277-786X},
  keywords     = {PDMS molding,UV curable resins,soft lithography,light steering.,reverse replication},
  language     = {eng},
  location     = {Eindhoven, The Netherlands},
  pages        = {96610V:96610V-1--96610V:96610V-7},
  publisher    = {SPIE},
  title        = {Reverse replication of circular micro grating structures with soft lithography},
  url          = {http://dx.doi.org/10.1117/12.2194351},
  volume       = {9661},
  year         = {2015},
}

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