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Theoretical study of the impact of stress and interstitial oxygen on the behavior of intrinsic point defects in growing CZ-Si crystals

K Sueoka, K Nakamura and Jan Vanhellemont UGent (2015) GADEST, Abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
GADEST, Abstracts
conference name
Gettering and Defect Engineering in Semiconductor Technology 2015 (GADEST 2015): 30 Years of GADEST
conference location
Bad Staffelstein, Germany
conference start
2015-09-20
conference end
2015-09-25
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
6899479
handle
http://hdl.handle.net/1854/LU-6899479
date created
2015-08-12 12:43:13
date last changed
2016-12-19 15:37:13
@inproceedings{6899479,
  author       = {Sueoka, K and Nakamura, K and Vanhellemont, Jan},
  booktitle    = {GADEST, Abstracts},
  language     = {eng},
  location     = {Bad Staffelstein, Germany},
  title        = {Theoretical study of the impact of stress and interstitial oxygen on the behavior of intrinsic point defects in growing CZ-Si crystals},
  year         = {2015},
}

Chicago
Sueoka, K, K Nakamura, and Jan Vanhellemont. 2015. “Theoretical Study of the Impact of Stress and Interstitial Oxygen on the Behavior of Intrinsic Point Defects in Growing CZ-Si Crystals.” In GADEST, Abstracts.
APA
Sueoka, K, Nakamura, K., & Vanhellemont, J. (2015). Theoretical study of the impact of stress and interstitial oxygen on the behavior of intrinsic point defects in growing CZ-Si crystals. GADEST, Abstracts. Presented at the Gettering and Defect Engineering in Semiconductor Technology 2015 (GADEST 2015): 30 Years of GADEST.
Vancouver
1.
Sueoka K, Nakamura K, Vanhellemont J. Theoretical study of the impact of stress and interstitial oxygen on the behavior of intrinsic point defects in growing CZ-Si crystals. GADEST, Abstracts. 2015.
MLA
Sueoka, K, K Nakamura, and Jan Vanhellemont. “Theoretical Study of the Impact of Stress and Interstitial Oxygen on the Behavior of Intrinsic Point Defects in Growing CZ-Si Crystals.” GADEST, Abstracts. 2015. Print.