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Modeling target erosion during reactive sputtering

Koen Strijckmans (UGent) and Diederik Depla (UGent)
(2015) APPLIED SURFACE SCIENCE. 133. p.185-192
Author
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Keywords
Modeling, Reactive sputtering, RSD2013, Racetrack, Thin films, MONTE-CARLO-SIMULATION, DEPOSITION

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Citation

Please use this url to cite or link to this publication:

MLA
Strijckmans, Koen, and Diederik Depla. “Modeling Target Erosion During Reactive Sputtering.” APPLIED SURFACE SCIENCE 133 (2015): 185–192. Print.
APA
Strijckmans, K., & Depla, D. (2015). Modeling target erosion during reactive sputtering. APPLIED SURFACE SCIENCE, 133, 185–192.
Chicago author-date
Strijckmans, Koen, and Diederik Depla. 2015. “Modeling Target Erosion During Reactive Sputtering.” Applied Surface Science 133: 185–192.
Chicago author-date (all authors)
Strijckmans, Koen, and Diederik Depla. 2015. “Modeling Target Erosion During Reactive Sputtering.” Applied Surface Science 133: 185–192.
Vancouver
1.
Strijckmans K, Depla D. Modeling target erosion during reactive sputtering. APPLIED SURFACE SCIENCE. 2015;133:185–92.
IEEE
[1]
K. Strijckmans and D. Depla, “Modeling target erosion during reactive sputtering,” APPLIED SURFACE SCIENCE, vol. 133, pp. 185–192, 2015.
@article{6837665,
  author       = {Strijckmans, Koen and Depla, Diederik},
  issn         = {0169-4332},
  journal      = {APPLIED SURFACE SCIENCE},
  keywords     = {Modeling,Reactive sputtering,RSD2013,Racetrack,Thin films,MONTE-CARLO-SIMULATION,DEPOSITION},
  language     = {eng},
  pages        = {185--192},
  title        = {Modeling target erosion during reactive sputtering},
  url          = {http://dx.doi.org/10.1149/2.0461504jes},
  volume       = {133},
  year         = {2015},
}

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