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Modeling target erosion during reactive sputtering

Koen Strijckmans (UGent) and Diederik Depla (UGent)
(2015) APPLIED SURFACE SCIENCE. 133. p.185-192
Author
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Keywords
Modeling, Reactive sputtering, RSD2013, Racetrack, Thin films, MONTE-CARLO-SIMULATION, DEPOSITION

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Citation

Please use this url to cite or link to this publication:

MLA
Strijckmans, Koen, and Diederik Depla. “Modeling Target Erosion During Reactive Sputtering.” APPLIED SURFACE SCIENCE 133 (2015): 185–192. Print.
APA
Strijckmans, K., & Depla, D. (2015). Modeling target erosion during reactive sputtering. APPLIED SURFACE SCIENCE, 133, 185–192.
Chicago author-date
Strijckmans, Koen, and Diederik Depla. 2015. “Modeling Target Erosion During Reactive Sputtering.” Applied Surface Science 133: 185–192.
Chicago author-date (all authors)
Strijckmans, Koen, and Diederik Depla. 2015. “Modeling Target Erosion During Reactive Sputtering.” Applied Surface Science 133: 185–192.
Vancouver
1.
Strijckmans K, Depla D. Modeling target erosion during reactive sputtering. APPLIED SURFACE SCIENCE. 2015;133:185–92.
IEEE
[1]
K. Strijckmans and D. Depla, “Modeling target erosion during reactive sputtering,” APPLIED SURFACE SCIENCE, vol. 133, pp. 185–192, 2015.
@article{6837665,
  author       = {{Strijckmans, Koen and Depla, Diederik}},
  issn         = {{0169-4332}},
  journal      = {{APPLIED SURFACE SCIENCE}},
  keywords     = {{Modeling,Reactive sputtering,RSD2013,Racetrack,Thin films,MONTE-CARLO-SIMULATION,DEPOSITION}},
  language     = {{eng}},
  pages        = {{185--192}},
  title        = {{Modeling target erosion during reactive sputtering}},
  url          = {{http://dx.doi.org/10.1149/2.0461504jes}},
  volume       = {{133}},
  year         = {{2015}},
}

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