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Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators

(2008) IEEE PHOTONICS TECHNOLOGY LETTERS. 20(23). p.2004-2006
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Abstract
We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mu m.
Keywords
resonator, Focused ion beam, silicon, slot waveguide

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Citation

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Chicago
Schrauwen, Jonathan, Jeroen Van Lysebettens, Tom Claes, Katrien De Vos, Peter Bienstman, Dries Van Thourhout, and Roel Baets. 2008. “Focused-ion-beam Fabrication of Slots in Silicon Waveguides and Ring Resonators.” Ieee Photonics Technology Letters 20 (23): 2004–2006.
APA
Schrauwen, J., Van Lysebettens, J., Claes, T., De Vos, K., Bienstman, P., Van Thourhout, D., & Baets, R. (2008). Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators. IEEE PHOTONICS TECHNOLOGY LETTERS, 20(23), 2004–2006.
Vancouver
1.
Schrauwen J, Van Lysebettens J, Claes T, De Vos K, Bienstman P, Van Thourhout D, et al. Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators. IEEE PHOTONICS TECHNOLOGY LETTERS. 2008;20(23):2004–6.
MLA
Schrauwen, Jonathan, Jeroen Van Lysebettens, Tom Claes, et al. “Focused-ion-beam Fabrication of Slots in Silicon Waveguides and Ring Resonators.” IEEE PHOTONICS TECHNOLOGY LETTERS 20.23 (2008): 2004–2006. Print.
@article{667923,
  abstract     = {We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mu m.},
  author       = {Schrauwen, Jonathan and Van Lysebettens, Jeroen and Claes, Tom and De Vos, Katrien and Bienstman, Peter and Van Thourhout, Dries and Baets, Roel},
  issn         = {1041-1135},
  journal      = {IEEE PHOTONICS TECHNOLOGY LETTERS},
  keyword      = {resonator,Focused ion beam,silicon,slot waveguide},
  language     = {eng},
  number       = {23},
  pages        = {2004--2006},
  title        = {Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators},
  url          = {http://dx.doi.org/10.1109/LPT.2008.2006001},
  volume       = {20},
  year         = {2008},
}

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