Advanced search
1 file | 480.90 KB Add to list

Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators

(2008) IEEE PHOTONICS TECHNOLOGY LETTERS. 20(23). p.2004-2006
Author
Organization
Abstract
We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mu m.
Keywords
resonator, Focused ion beam, silicon, slot waveguide

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 480.90 KB

Citation

Please use this url to cite or link to this publication:

MLA
Schrauwen, Jonathan et al. “Focused-ion-beam Fabrication of Slots in Silicon Waveguides and Ring Resonators.” IEEE PHOTONICS TECHNOLOGY LETTERS 20.23 (2008): 2004–2006. Print.
APA
Schrauwen, J., Van Lysebettens, J., Claes, T., De Vos, K., Bienstman, P., Van Thourhout, D., & Baets, R. (2008). Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators. IEEE PHOTONICS TECHNOLOGY LETTERS, 20(23), 2004–2006.
Chicago author-date
Schrauwen, Jonathan, Jeroen Van Lysebettens, Tom Claes, Katrien De Vos, Peter Bienstman, Dries Van Thourhout, and Roel Baets. 2008. “Focused-ion-beam Fabrication of Slots in Silicon Waveguides and Ring Resonators.” Ieee Photonics Technology Letters 20 (23): 2004–2006.
Chicago author-date (all authors)
Schrauwen, Jonathan, Jeroen Van Lysebettens, Tom Claes, Katrien De Vos, Peter Bienstman, Dries Van Thourhout, and Roel Baets. 2008. “Focused-ion-beam Fabrication of Slots in Silicon Waveguides and Ring Resonators.” Ieee Photonics Technology Letters 20 (23): 2004–2006.
Vancouver
1.
Schrauwen J, Van Lysebettens J, Claes T, De Vos K, Bienstman P, Van Thourhout D, et al. Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators. IEEE PHOTONICS TECHNOLOGY LETTERS. 2008;20(23):2004–6.
IEEE
[1]
J. Schrauwen et al., “Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators,” IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 20, no. 23, pp. 2004–2006, 2008.
@article{667923,
  abstract     = {We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mu m.},
  author       = {Schrauwen, Jonathan and Van Lysebettens, Jeroen and Claes, Tom and De Vos, Katrien and Bienstman, Peter and Van Thourhout, Dries and Baets, Roel},
  issn         = {1041-1135},
  journal      = {IEEE PHOTONICS TECHNOLOGY LETTERS},
  keywords     = {resonator,Focused ion beam,silicon,slot waveguide},
  language     = {eng},
  number       = {23},
  pages        = {2004--2006},
  title        = {Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators},
  url          = {http://dx.doi.org/10.1109/LPT.2008.2006001},
  volume       = {20},
  year         = {2008},
}

Altmetric
View in Altmetric
Web of Science
Times cited: