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Formation and stability of NiSi in the presence of Co and Fe alloying elements

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Abstract
The formation and degradation of NiSi in the presence of Co and Fe alloying elements have been investigated. Alloyed Ni layers were characterized with in situ techniques to determine the stability of the NiSi phase on single crystalline and on polycrystalline Si substrates. It is shown that the phase stability is decreased with the addition of Co or Fe. The formation of the NiSi2 phase on Si(100) is initiated at a temperature that is more than 200 degrees C lower for the Ni alloys than for a reference Ni layer. Thereby a few percent of Co or Fe results in the formation of a polycrystalline NiSi2 phase on a single crystalline substrate. The low formation temperature of the NiSi2 phase in the presence of Co or Fe can be attributed to a mixing entropy effect. The morphological stability of the silicide films on Si(100) and on polycrystalline Si is improved due to the early formation of NiSi2 and is related to an increased film thickness and also to a higher deformation temperature for the poly-Si.

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MLA
Deduytsche, Davy et al. “Formation and Stability of NiSi in the Presence of Co and Fe Alloying Elements.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 26.6 (2008): 1971–1977. Print.
APA
Deduytsche, D., Detavernier, C., Vanmeirhaeghe, R., Jordan-Sweet, J., & Lavoie, C. (2008). Formation and stability of NiSi in the presence of Co and Fe alloying elements. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26(6), 1971–1977.
Chicago author-date
Deduytsche, Davy, Christophe Detavernier, Roland Vanmeirhaeghe, Jean Jordan-Sweet, and Christian Lavoie. 2008. “Formation and Stability of NiSi in the Presence of Co and Fe Alloying Elements.” Journal of Vacuum Science & Technology B 26 (6): 1971–1977.
Chicago author-date (all authors)
Deduytsche, Davy, Christophe Detavernier, Roland Vanmeirhaeghe, Jean Jordan-Sweet, and Christian Lavoie. 2008. “Formation and Stability of NiSi in the Presence of Co and Fe Alloying Elements.” Journal of Vacuum Science & Technology B 26 (6): 1971–1977.
Vancouver
1.
Deduytsche D, Detavernier C, Vanmeirhaeghe R, Jordan-Sweet J, Lavoie C. Formation and stability of NiSi in the presence of Co and Fe alloying elements. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 2008;26(6):1971–7.
IEEE
[1]
D. Deduytsche, C. Detavernier, R. Vanmeirhaeghe, J. Jordan-Sweet, and C. Lavoie, “Formation and stability of NiSi in the presence of Co and Fe alloying elements,” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 26, no. 6, pp. 1971–1977, 2008.
@article{610587,
  abstract     = {The formation and degradation of NiSi in the presence of Co and Fe alloying elements have been investigated. Alloyed Ni layers were characterized with in situ techniques to determine the stability of the NiSi phase on single crystalline and on polycrystalline Si substrates. It is shown that the phase stability is decreased with the addition of Co or Fe. The formation of the NiSi2 phase on Si(100) is initiated at a temperature that is more than 200 degrees C lower for the Ni alloys than for a reference Ni layer. Thereby a few percent of Co or Fe results in the formation of a polycrystalline NiSi2 phase on a single crystalline substrate. The low formation temperature of the NiSi2 phase in the presence of Co or Fe can be attributed to a mixing entropy effect. The morphological stability of the silicide films on Si(100) and on polycrystalline Si is improved due to the early formation of NiSi2 and is related to an increased film thickness and also to a higher deformation temperature for the poly-Si.},
  author       = {Deduytsche, Davy and Detavernier, Christophe and Vanmeirhaeghe, Roland and Jordan-Sweet, Jean and Lavoie, Christian},
  issn         = {1071-1023},
  journal      = {JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B},
  language     = {eng},
  number       = {6},
  pages        = {1971--1977},
  title        = {Formation and stability of NiSi in the presence of Co and Fe alloying elements},
  url          = {http://dx.doi.org/10.1116/1.3010719},
  volume       = {26},
  year         = {2008},
}

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