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A double-pole single-throw latching MEMS switch for reconfigurable distribution frames

Dries Dellaert (UGent) and Jan Doutreloigne (UGent)
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Abstract
A double-pole single-throw latching MEMS switch is presented, which could be used as reconfiguration switches in telecommunication networks. The switch can latch into a closed state so that no energy is needed to stay in that state. The latching mechanism was operated using thermal actuators which use a polysilicon heater underneath the structural layer. Using the MetalMUMPs technology, the switch was successfully fabricated and was able to latch into the closed state. Cycling tests of 10**5 latching cycles showed that the switch resistance remains below 3ohm.

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Chicago
Dellaert, Dries, and Jan Doutreloigne. 2015. “A Double-pole Single-throw Latching MEMS Switch for Reconfigurable Distribution Frames.” In 2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) , 205–208. IEEE.
APA
Dellaert, D., & Doutreloigne, J. (2015). A double-pole single-throw latching MEMS switch for reconfigurable distribution frames. 2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) (pp. 205–208). Presented at the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) , IEEE.
Vancouver
1.
Dellaert D, Doutreloigne J. A double-pole single-throw latching MEMS switch for reconfigurable distribution frames. 2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) . IEEE; 2015. p. 205–8.
MLA
Dellaert, Dries, and Jan Doutreloigne. “A Double-pole Single-throw Latching MEMS Switch for Reconfigurable Distribution Frames.” 2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) . IEEE, 2015. 205–208. Print.
@inproceedings{5963484,
  abstract     = {A double-pole single-throw latching MEMS switch is presented, which could be used as reconfiguration switches in telecommunication networks. The switch can latch into a closed state so that no energy is needed to stay in that state. The latching mechanism was operated using thermal actuators which use a polysilicon heater underneath the structural layer. Using the MetalMUMPs technology, the switch was successfully fabricated and was able to latch into the closed state. Cycling tests of 10**5 latching cycles showed that the switch resistance remains below 3ohm.},
  author       = {Dellaert, Dries and Doutreloigne, Jan},
  booktitle    = {2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) },
  isbn         = {978-1-4799-8625-5},
  language     = {eng},
  location     = {Montpellier, FRANCE},
  pages        = {205--208},
  publisher    = {IEEE},
  title        = {A double-pole single-throw latching MEMS switch for reconfigurable distribution frames},
  year         = {2015},
}

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