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lOptical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL

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Abstract
Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UV-curable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed.
Keywords
polymer photonics, FABRICATION, single-mode waveguide, integrated optics, UV nano-imprinting, optical interconnect, optical coupling

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Chicago
Karppinen, Mikko , Noora Salminen, Tia Korhonen, Teemu Alajoki, Jarno Petäjä, Erwin Bosman, Geert Van Steenberge, et al. 2015. “lOptical Coupling Structure Made by Imprinting Between Single-mode Polymer Waveguide and Embedded VCSEL.” In Proceedings of SPIE. Vol. 9368. SPIE.
APA
Karppinen, M., Salminen, N., Korhonen, T., Alajoki, T., Petäjä, J., Bosman, E., Van Steenberge, G., et al. (2015). lOptical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL. Proceedings of SPIE (Vol. 9368). Presented at the Conference on Optical Interconnects XV, SPIE.
Vancouver
1.
Karppinen M, Salminen N, Korhonen T, Alajoki T, Petäjä J, Bosman E, et al. lOptical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL. Proceedings of SPIE. SPIE; 2015.
MLA
Karppinen, Mikko , Noora Salminen, Tia Korhonen, et al. “lOptical Coupling Structure Made by Imprinting Between Single-mode Polymer Waveguide and Embedded VCSEL.” Proceedings of SPIE. Vol. 9368. SPIE, 2015. Print.
@inproceedings{5958516,
  abstract     = {Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UV-curable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed.},
  articleno    = {93680H},
  author       = {Karppinen, Mikko  and Salminen, Noora  and Korhonen, Tia and Alajoki, Teemu  and Pet{\"a}j{\"a}, Jarno and Bosman, Erwin and Van Steenberge, Geert and Justice, John and Khan, Umar  and Corbett, Brian and Boersma, Arjen },
  booktitle    = {Proceedings of SPIE},
  isbn         = {9781628414585},
  issn         = {0277-786X},
  keyword      = {polymer photonics,FABRICATION,single-mode waveguide,integrated optics,UV nano-imprinting,optical interconnect,optical coupling},
  language     = {eng},
  location     = {San Francisco, California, United States},
  pages        = {8},
  publisher    = {SPIE},
  title        = {lOptical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL},
  url          = {http://dx.doi.org/10.1117/12.2082935},
  volume       = {9368},
  year         = {2015},
}

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