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Diagnostics of an argon/oxygen magnetron plasma and comparison with Monte Carlo simulation

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Chicago
Gaillard, Mireille, Laurent Schwaederlé, Stijn Mahieu, Wouter Leroy, Diederik Depla, and Annemie Bogaerts. 2008. “Diagnostics of an Argon/oxygen Magnetron Plasma and Comparison with Monte Carlo Simulation.” In Proceedings of ICTF 14 & RSD 2008, ed. Roger De Gryse, Diederik Depla, Dirk Poelman, Stijn Mahieu, Wouter Leroy, and Hilde Poelman, 303–303. Gent, Belgium.
APA
Gaillard, M., Schwaederlé, L., Mahieu, S., Leroy, W., Depla, D., & Bogaerts, A. (2008). Diagnostics of an argon/oxygen magnetron plasma and comparison with Monte Carlo simulation. In R. De Gryse, D. Depla, D. Poelman, S. Mahieu, W. Leroy, & H. Poelman (Eds.), Proceedings of ICTF 14 & RSD 2008 (pp. 303–303). Presented at the 14th International Conference on Thin Films & Reactive Sputter Deposition 2008, Gent, Belgium.
Vancouver
1.
Gaillard M, Schwaederlé L, Mahieu S, Leroy W, Depla D, Bogaerts A. Diagnostics of an argon/oxygen magnetron plasma and comparison with Monte Carlo simulation. In: De Gryse R, Depla D, Poelman D, Mahieu S, Leroy W, Poelman H, editors. Proceedings of ICTF 14 & RSD 2008. Gent, Belgium; 2008. p. 303–303.
MLA
Gaillard, Mireille, Laurent Schwaederlé, Stijn Mahieu, et al. “Diagnostics of an Argon/oxygen Magnetron Plasma and Comparison with Monte Carlo Simulation.” Proceedings of ICTF 14 & RSD 2008. Ed. Roger De Gryse et al. Gent, Belgium, 2008. 303–303. Print.
@inproceedings{592232,
  author       = {Gaillard, Mireille and Schwaederl{\'e}, Laurent and Mahieu, Stijn and Leroy, Wouter and Depla, Diederik and Bogaerts, Annemie},
  booktitle    = {Proceedings of ICTF 14 \& RSD 2008},
  editor       = {De Gryse, Roger and Depla, Diederik and Poelman, Dirk and Mahieu, Stijn and Leroy, Wouter and Poelman, Hilde},
  isbn         = {978-90-334-7347-0},
  language     = {eng},
  location     = {Gent, Belgium},
  pages        = {303--303},
  title        = {Diagnostics of an argon/oxygen magnetron plasma and comparison with Monte Carlo simulation},
  year         = {2008},
}