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Characterization of MgxAlyOz thin films grown by reactive magnetron sputtering

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MLA
Martins Saraiva, Marta et al. “Characterization of MgxAlyOz Thin Films Grown by Reactive Magnetron Sputtering.” Proceedings of ICTF 14 & RSD 2008. Ed. Roger De Gryse et al. Gent, Belgium, 2008. 48–48. Print.
APA
Martins Saraiva, M., Chen, H., Leroy, W., Mahieu, S., Jehanathan, N., Lebedev, O., Georgieva, V., et al. (2008). Characterization of MgxAlyOz thin films grown by reactive magnetron sputtering. In R. De Gryse, D. Depla, D. Poelman, S. Mahieu, W. Leroy, & H. Poelman (Eds.), Proceedings of ICTF 14 & RSD 2008 (pp. 48–48). Presented at the 14th International Conference on Thin Films & Reactive Sputter Deposition 2008, Gent, Belgium.
Chicago author-date
Martins Saraiva, Marta, Hong Chen, Wouter Leroy, Stijn Mahieu, Neeru Jehanathan, Oleg Lebedev, Violetta Georgieva, Rosita Persoons, and Diederik Depla. 2008. “Characterization of MgxAlyOz Thin Films Grown by Reactive Magnetron Sputtering.” In Proceedings of ICTF 14 & RSD 2008, ed. Roger De Gryse, Diederik Depla, Dirk Poelman, Stijn Mahieu, Wouter Leroy, and Hilde Poelman, 48–48. Gent, Belgium.
Chicago author-date (all authors)
Martins Saraiva, Marta, Hong Chen, Wouter Leroy, Stijn Mahieu, Neeru Jehanathan, Oleg Lebedev, Violetta Georgieva, Rosita Persoons, and Diederik Depla. 2008. “Characterization of MgxAlyOz Thin Films Grown by Reactive Magnetron Sputtering.” In Proceedings of ICTF 14 & RSD 2008, ed. Roger De Gryse, Diederik Depla, Dirk Poelman, Stijn Mahieu, Wouter Leroy, and Hilde Poelman, 48–48. Gent, Belgium.
Vancouver
1.
Martins Saraiva M, Chen H, Leroy W, Mahieu S, Jehanathan N, Lebedev O, et al. Characterization of MgxAlyOz thin films grown by reactive magnetron sputtering. In: De Gryse R, Depla D, Poelman D, Mahieu S, Leroy W, Poelman H, editors. Proceedings of ICTF 14 & RSD 2008. Gent, Belgium; 2008. p. 48–48.
IEEE
[1]
M. Martins Saraiva et al., “Characterization of MgxAlyOz thin films grown by reactive magnetron sputtering,” in Proceedings of ICTF 14 & RSD 2008, Gent, Belgium, 2008, pp. 48–48.
@inproceedings{592218,
  author       = {{Martins Saraiva, Marta and Chen, Hong and Leroy, Wouter and Mahieu, Stijn and Jehanathan, Neeru and Lebedev, Oleg and Georgieva, Violetta and Persoons, Rosita and Depla, Diederik}},
  booktitle    = {{Proceedings of ICTF 14 & RSD 2008}},
  editor       = {{De Gryse, Roger and Depla, Diederik and Poelman, Dirk and Mahieu, Stijn and Leroy, Wouter and Poelman, Hilde}},
  isbn         = {{978-90-334-7347-0}},
  language     = {{eng}},
  location     = {{Gent, Belgium}},
  pages        = {{48--48}},
  title        = {{Characterization of MgxAlyOz thin films grown by reactive magnetron sputtering}},
  year         = {{2008}},
}