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Compact thermally actuated latching MEMS switch with large contact force

Dries Dellaert (UGent) and Jan Doutreloigne (UGent)
(2015) ELECTRONICS LETTERS. 51(1). p.80-U1234
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Abstract
A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact configuration of thermal actuators. In the proposed latching mechanism, the necessary displacement of one of the contacts can be reduced, allowing the use of a linear thermal actuator. This linear actuator together with a V-shaped actuator can be aligned next to each other, requiring less area than the classical latching switch design. Another advantage of the proposed design is the high contact force of 1.33 mN, ensuring a stable contact resistance. The latching switch was fabricated in the Metal multi-user MEMS processes (MUMPs) technology and its functionality was successfully tested. In the latched state, a switch resistance of 0.6 Ω was measured.
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Citation

Please use this url to cite or link to this publication:

Chicago
Dellaert, Dries, and Jan Doutreloigne. 2015. “Compact Thermally Actuated Latching MEMS Switch with Large Contact Force.” Electronics Letters 51 (1): 80–U1234.
APA
Dellaert, D., & Doutreloigne, J. (2015). Compact thermally actuated latching MEMS switch with large contact force. ELECTRONICS LETTERS, 51(1), 80–U1234.
Vancouver
1.
Dellaert D, Doutreloigne J. Compact thermally actuated latching MEMS switch with large contact force. ELECTRONICS LETTERS. 2015;51(1):80–U1234.
MLA
Dellaert, Dries, and Jan Doutreloigne. “Compact Thermally Actuated Latching MEMS Switch with Large Contact Force.” ELECTRONICS LETTERS 51.1 (2015): 80–U1234. Print.
@article{5841692,
  abstract     = {A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact configuration of thermal actuators. In the proposed latching mechanism, the necessary displacement of one of the contacts can be reduced, allowing the use of a linear thermal actuator. This linear actuator together with a V-shaped actuator can be aligned next to each other, requiring less area than the classical latching switch design. Another advantage of the proposed design is the high contact force of 1.33 mN, ensuring a stable contact resistance. The latching switch was fabricated in the Metal multi-user MEMS processes (MUMPs) technology and its functionality was successfully tested. In the latched state, a switch resistance of 0.6 \ensuremath{\Omega} was measured.},
  author       = {Dellaert, Dries and Doutreloigne, Jan},
  issn         = {0013-5194},
  journal      = {ELECTRONICS LETTERS},
  keyword      = {WAVE-GUIDE},
  language     = {eng},
  number       = {1},
  pages        = {80--U1234},
  title        = {Compact thermally actuated latching MEMS switch with large contact force},
  url          = {http://dx.doi.org/10.1049/el.2014.3234},
  volume       = {51},
  year         = {2015},
}

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