Advanced search
1 file | 901.16 KB

The role of the erosion groove during reactive sputter deposition

Diederik Depla (UGent) , Koen Strijckmans (UGent) and Roger De Gryse (UGent)
(2014) SURFACE & COATINGS TECHNOLOGY. 258. p.1011-1015
Author
Organization
Keywords
Reactive sputtering, Erosion groove, Simulations, Hysteresis, DISCHARGE, SIMULATION, MAGNETRON

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 901.16 KB

Citation

Please use this url to cite or link to this publication:

Chicago
Depla, Diederik, Koen Strijckmans, and Roger De Gryse. 2014. “The Role of the Erosion Groove During Reactive Sputter Deposition.” Surface & Coatings Technology 258: 1011–1015.
APA
Depla, D., Strijckmans, K., & De Gryse, R. (2014). The role of the erosion groove during reactive sputter deposition. SURFACE & COATINGS TECHNOLOGY, 258, 1011–1015.
Vancouver
1.
Depla D, Strijckmans K, De Gryse R. The role of the erosion groove during reactive sputter deposition. SURFACE & COATINGS TECHNOLOGY. 2014;258:1011–5.
MLA
Depla, Diederik, Koen Strijckmans, and Roger De Gryse. “The Role of the Erosion Groove During Reactive Sputter Deposition.” SURFACE & COATINGS TECHNOLOGY 258 (2014): 1011–1015. Print.
@article{5840423,
  author       = {Depla, Diederik and Strijckmans, Koen and De Gryse, Roger},
  issn         = {0257-8972},
  journal      = {SURFACE \& COATINGS TECHNOLOGY},
  language     = {eng},
  pages        = {1011--1015},
  title        = {The role of the erosion groove during reactive sputter deposition},
  url          = {http://dx.doi.org/10.1016/j.surfcoat.2014.07.038},
  volume       = {258},
  year         = {2014},
}

Altmetric
View in Altmetric
Web of Science
Times cited: