The role of the erosion groove during reactive sputter deposition
- Author
- Diederik Depla (UGent) , Koen Strijckmans (UGent) and Roger De Gryse (UGent)
- Organization
- Keywords
- Reactive sputtering, Erosion groove, Simulations, Hysteresis, DISCHARGE, SIMULATION, MAGNETRON
Downloads
-
(...).pdf
- full text
- |
- UGent only
- |
- |
- 901.16 KB
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-5840423
- MLA
- Depla, Diederik, et al. “The Role of the Erosion Groove during Reactive Sputter Deposition.” SURFACE & COATINGS TECHNOLOGY, vol. 258, 2014, pp. 1011–15, doi:10.1016/j.surfcoat.2014.07.038.
- APA
- Depla, D., Strijckmans, K., & De Gryse, R. (2014). The role of the erosion groove during reactive sputter deposition. SURFACE & COATINGS TECHNOLOGY, 258, 1011–1015. https://doi.org/10.1016/j.surfcoat.2014.07.038
- Chicago author-date
- Depla, Diederik, Koen Strijckmans, and Roger De Gryse. 2014. “The Role of the Erosion Groove during Reactive Sputter Deposition.” SURFACE & COATINGS TECHNOLOGY 258: 1011–15. https://doi.org/10.1016/j.surfcoat.2014.07.038.
- Chicago author-date (all authors)
- Depla, Diederik, Koen Strijckmans, and Roger De Gryse. 2014. “The Role of the Erosion Groove during Reactive Sputter Deposition.” SURFACE & COATINGS TECHNOLOGY 258: 1011–1015. doi:10.1016/j.surfcoat.2014.07.038.
- Vancouver
- 1.Depla D, Strijckmans K, De Gryse R. The role of the erosion groove during reactive sputter deposition. SURFACE & COATINGS TECHNOLOGY. 2014;258:1011–5.
- IEEE
- [1]D. Depla, K. Strijckmans, and R. De Gryse, “The role of the erosion groove during reactive sputter deposition,” SURFACE & COATINGS TECHNOLOGY, vol. 258, pp. 1011–1015, 2014.
@article{5840423,
author = {{Depla, Diederik and Strijckmans, Koen and De Gryse, Roger}},
issn = {{0257-8972}},
journal = {{SURFACE & COATINGS TECHNOLOGY}},
keywords = {{Reactive sputtering,Erosion groove,Simulations,Hysteresis,DISCHARGE,SIMULATION,MAGNETRON}},
language = {{eng}},
pages = {{1011--1015}},
title = {{The role of the erosion groove during reactive sputter deposition}},
url = {{http://doi.org/10.1016/j.surfcoat.2014.07.038}},
volume = {{258}},
year = {{2014}},
}
- Altmetric
- View in Altmetric
- Web of Science
- Times cited: