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Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering

(2014) NANOSCALE. 6(24). p.14991-14998
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Abstract
Atomic layer deposition (ALD) enables the conformal coating of porous materials, making the technique suitable for pore size tuning at the atomic level, e.g., for applications in catalysis, gas separation and sensing. It is, however, not straightforward to obtain information about the conformality of ALD coatings deposited in pores with diameters in the low mesoporous regime (< 10 nm). In this work, it is demonstrated that in situ synchrotron based grazing incidence small angle x-ray scattering (GISAXS) can provide valuable information on the change in density and internal surface area during ALD of TiO2 in a porous titania film with small mesopores (3-8 nm). The results are shown to be in good agreement with in situ x-ray fluorescence data representing the evolution of the amount of Ti atoms deposited in the porous film. Analysis of both data sets indicates that the minimum pore diameter that can be achieved by ALD is determined by the size of the Ti-precursor molecule.
Keywords
SENSITIZED SOLAR-CELLS, ELLIPSOMETRIC POROSIMETRY, ALUMINA TUBULAR MEMBRANES, SILICA FILMS, TITANIA, TIO2, TOMOGRAPHY, MESOPHASES, MORPHOLOGY, REDUCTION

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Citation

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Chicago
Dendooven, Jolien, Kilian Devloo-Casier, Matthias Ide, Kathryn Grandfield, Mert Kurttepeli, Karl F Ludwig, Sara Bals, Pascal Van Der Voort, and Christophe Detavernier. 2014. “Atomic Layer Deposition-based Tuning of the Pore Size in Mesoporous Thin Films Studied by in Situ Grazing Incidence Small Angle X-ray Scattering.” Nanoscale 6 (24): 14991–14998.
APA
Dendooven, J., Devloo-Casier, K., Ide, M., Grandfield, K., Kurttepeli, M., Ludwig, K. F., Bals, S., et al. (2014). Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering. NANOSCALE, 6(24), 14991–14998.
Vancouver
1.
Dendooven J, Devloo-Casier K, Ide M, Grandfield K, Kurttepeli M, Ludwig KF, et al. Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering. NANOSCALE. 2014;6(24):14991–8.
MLA
Dendooven, Jolien, Kilian Devloo-Casier, Matthias Ide, et al. “Atomic Layer Deposition-based Tuning of the Pore Size in Mesoporous Thin Films Studied by in Situ Grazing Incidence Small Angle X-ray Scattering.” NANOSCALE 6.24 (2014): 14991–14998. Print.
@article{5791005,
  abstract     = {Atomic layer deposition (ALD) enables the conformal coating of porous materials, making the technique suitable for pore size tuning at the atomic level, e.g., for applications in catalysis, gas separation and sensing. It is, however, not straightforward to obtain information about the conformality of ALD coatings deposited in pores with diameters in the low mesoporous regime ({\textlangle} 10 nm). In this work, it is demonstrated that in situ synchrotron based grazing incidence small angle x-ray scattering (GISAXS) can provide valuable information on the change in density and internal surface area during ALD of TiO2 in a porous titania film with small mesopores (3-8 nm). The results are shown to be in good agreement with in situ x-ray fluorescence data representing the evolution of the amount of Ti atoms deposited in the porous film. Analysis of both data sets indicates that the minimum pore diameter that can be achieved by ALD is determined by the size of the Ti-precursor molecule.},
  author       = {Dendooven, Jolien and Devloo-Casier, Kilian and Ide, Matthias and Grandfield, Kathryn and Kurttepeli, Mert and Ludwig, Karl F and Bals, Sara and Van Der Voort, Pascal and Detavernier, Christophe},
  issn         = {2040-3364},
  journal      = {NANOSCALE},
  keyword      = {SENSITIZED SOLAR-CELLS,ELLIPSOMETRIC POROSIMETRY,ALUMINA TUBULAR MEMBRANES,SILICA FILMS,TITANIA,TIO2,TOMOGRAPHY,MESOPHASES,MORPHOLOGY,REDUCTION},
  language     = {eng},
  number       = {24},
  pages        = {14991--14998},
  title        = {Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering},
  url          = {http://dx.doi.org/10.1039/c4nr05049e},
  volume       = {6},
  year         = {2014},
}

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