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Replicating micro-optical structures using soft embossing technique

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SECONDOS, IWT-nr 120019, 2013-2016.
Abstract
In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.
Keywords
template lithography, soft embossing, UV curable resins, PDMS molding, light steering, grating diffraction

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Citation

Please use this url to cite or link to this publication:

Chicago
Shang, Xiaobing, Jin Yi Tan, Jelle De Smet, Pankaj Joshi, Esma Islamaj, Dieter Cuypers, Michael Vervaeke, Jurgen Van Erps, Hugo Thienpont, and Herbert De Smet. 2014. “Replicating Micro-optical Structures Using Soft Embossing Technique.” In Proceedings of SPIE, ed. UFW Behringer. Vol. 9231. Proc. of SPIE.
APA
Shang, X., Tan, J. Y., De Smet, J., Joshi, P., Islamaj, E., Cuypers, D., Vervaeke, M., et al. (2014). Replicating micro-optical structures using soft embossing technique. In U. Behringer (Ed.), Proceedings of SPIE (Vol. 9231). Presented at the 30th European Mask and Lithography Conference (EMLC - 2014), Proc. of SPIE.
Vancouver
1.
Shang X, Tan JY, De Smet J, Joshi P, Islamaj E, Cuypers D, et al. Replicating micro-optical structures using soft embossing technique. In: Behringer U, editor. Proceedings of SPIE. Proc. of SPIE; 2014.
MLA
Shang, Xiaobing, Jin Yi Tan, Jelle De Smet, et al. “Replicating Micro-optical Structures Using Soft Embossing Technique.” Proceedings of SPIE. Ed. UFW Behringer. Vol. 9231. Proc. of SPIE, 2014. Print.
@inproceedings{5748821,
  abstract     = {In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.},
  articleno    = {UNSP 92310H},
  author       = {Shang, Xiaobing and Tan, Jin Yi and De Smet, Jelle and Joshi, Pankaj and Islamaj, Esma and Cuypers, Dieter and Vervaeke, Michael and Van Erps, Jurgen and Thienpont, Hugo and De Smet, Herbert},
  booktitle    = {Proceedings of SPIE},
  editor       = {Behringer, UFW },
  isbn         = {9781628412857},
  issn         = {0277-786X},
  keyword      = {template lithography,soft embossing,UV curable resins,PDMS molding,light steering,grating diffraction},
  language     = {eng},
  location     = {Dresden, Germany},
  pages        = {7},
  publisher    = {Proc. of SPIE},
  title        = {Replicating micro-optical structures using soft embossing technique},
  url          = {http://dx.doi.org/10.1117/12.2065912},
  volume       = {9231},
  year         = {2014},
}

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