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Replicating micro-optical structures using soft embossing technique

Xiaobing Shang, Jin Yi Tan, Jelle De Smet UGent, Pankaj Joshi, Esma Islamaj, Dieter Cuypers UGent, Michael Vervaeke, Jurgen Van Erps, Hugo Thienpont and Herbert De Smet UGent (2014) Proceedings of SPIE. 9231.
abstract
In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (proceedingsPaper)
publication status
published
subject
keyword
template lithography, soft embossing, UV curable resins, PDMS molding, light steering, grating diffraction
in
Proceedings of SPIE
editor
UFW Behringer
volume
9231
issue title
30TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
article number
UNSP 92310H
pages
7 pages
publisher
Proc. of SPIE
conference name
30th European Mask and Lithography Conference (EMLC - 2014)
conference location
Dresden, Germany
conference start
2014-06-24
conference end
2014-06-25
Web of Science type
Proceedings Paper
Web of Science id
000348195400012
ISSN
0277-786X
ISBN
9781628412857
DOI
10.1117/12.2065912
project
SECONDOS, IWT-nr 120019, 2013-2016.
language
English
UGent publication?
yes
classification
P1
copyright statement
I have transferred the copyright for this publication to the publisher
id
5748821
handle
http://hdl.handle.net/1854/LU-5748821
date created
2014-11-04 14:17:26
date last changed
2016-12-21 15:41:10
@inproceedings{5748821,
  abstract     = {In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.},
  articleno    = {UNSP 92310H},
  author       = {Shang, Xiaobing and Tan, Jin Yi and De Smet, Jelle and Joshi, Pankaj and Islamaj, Esma and Cuypers, Dieter and Vervaeke, Michael and Van Erps, Jurgen and Thienpont, Hugo and De Smet, Herbert},
  booktitle    = {Proceedings of SPIE},
  editor       = {Behringer, UFW },
  isbn         = {9781628412857},
  issn         = {0277-786X},
  keyword      = {template lithography,soft embossing,UV curable resins,PDMS molding,light steering,grating diffraction},
  language     = {eng},
  location     = {Dresden, Germany},
  pages        = {7},
  publisher    = {Proc. of SPIE},
  title        = {Replicating micro-optical structures using soft embossing technique},
  url          = {http://dx.doi.org/10.1117/12.2065912},
  volume       = {9231},
  year         = {2014},
}

Chicago
Shang, Xiaobing, Jin Yi Tan, Jelle De Smet, Pankaj Joshi, Esma Islamaj, Dieter Cuypers, Michael Vervaeke, Jurgen Van Erps, Hugo Thienpont, and Herbert De Smet. 2014. “Replicating Micro-optical Structures Using Soft Embossing Technique.” In Proceedings of SPIE, ed. UFW Behringer. Vol. 9231. Proc. of SPIE.
APA
Shang, X., Tan, J. Y., De Smet, J., Joshi, P., Islamaj, E., Cuypers, D., Vervaeke, M., et al. (2014). Replicating micro-optical structures using soft embossing technique. In U. Behringer (Ed.), Proceedings of SPIE (Vol. 9231). Presented at the 30th European Mask and Lithography Conference (EMLC - 2014), Proc. of SPIE.
Vancouver
1.
Shang X, Tan JY, De Smet J, Joshi P, Islamaj E, Cuypers D, et al. Replicating micro-optical structures using soft embossing technique. In: Behringer U, editor. Proceedings of SPIE. Proc. of SPIE; 2014.
MLA
Shang, Xiaobing, Jin Yi Tan, Jelle De Smet, et al. “Replicating Micro-optical Structures Using Soft Embossing Technique.” Proceedings of SPIE. Ed. UFW Behringer. Vol. 9231. Proc. of SPIE, 2014. Print.