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Thermal expansion coefficients of Ni, Pt and Pd germanides and silicides

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Keywords
in-situ xrd, nickel silicide, thermal expansion

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Chicago
Geenen, Filip, Werner Knaepen, Filip Moens, Lena Brondeel, Ann Leenaers, Sven Van den Berghe, and Christophe Detavernier. 2014. “Thermal Expansion Coefficients of Ni, Pt and Pd Germanides and Silicides.” In Materials for Advanced Metallization, Abstracts.
APA
Geenen, F., Knaepen, W., Moens, F., Brondeel, L., Leenaers, A., Van den Berghe, S., & Detavernier, C. (2014). Thermal expansion coefficients of Ni, Pt and Pd germanides and silicides. Materials for Advanced Metallization, Abstracts. Presented at the Materials for Advanced Metallization 2014 (MAM 2014).
Vancouver
1.
Geenen F, Knaepen W, Moens F, Brondeel L, Leenaers A, Van den Berghe S, et al. Thermal expansion coefficients of Ni, Pt and Pd germanides and silicides. Materials for Advanced Metallization, Abstracts. 2014.
MLA
Geenen, Filip, Werner Knaepen, Filip Moens, et al. “Thermal Expansion Coefficients of Ni, Pt and Pd Germanides and Silicides.” Materials for Advanced Metallization, Abstracts. 2014. Print.
@inproceedings{5673786,
  author       = {Geenen, Filip and Knaepen, Werner and Moens, Filip and Brondeel, Lena and Leenaers, Ann and Van den Berghe, Sven and Detavernier, Christophe},
  booktitle    = {Materials for Advanced Metallization, Abstracts},
  keyword      = {in-situ xrd,nickel silicide,thermal expansion},
  language     = {eng},
  location     = {Chemnitz, Germany},
  title        = {Thermal expansion coefficients of Ni, Pt and Pd germanides and silicides},
  year         = {2014},
}