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Phase formation in intermixed Ni-Ge thin films: influence of Ge content and low-temperature nucleation of hexagonal nickel germanides

(2014) MICROELECTRONIC ENGINEERING. 120. p.168-173
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Keywords
Thin film, Germanium, Germanides, In situ XRD, Phase formation, Nickel

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Citation

Please use this url to cite or link to this publication:

Chicago
De Schutter, Bob, Wouter Devulder, A Schrauwen, K van Stiphout, T Perkisas, S Bals, A Vantomme, and Christophe Detavernier. 2014. “Phase Formation in Intermixed Ni-Ge Thin Films: Influence of Ge Content and Low-temperature Nucleation of Hexagonal Nickel Germanides.” Microelectronic Engineering 120: 168–173.
APA
De Schutter, B., Devulder, W., Schrauwen, A., van Stiphout, K., Perkisas, T., Bals, S., Vantomme, A., et al. (2014). Phase formation in intermixed Ni-Ge thin films: influence of Ge content and low-temperature nucleation of hexagonal nickel germanides. MICROELECTRONIC ENGINEERING, 120, 168–173.
Vancouver
1.
De Schutter B, Devulder W, Schrauwen A, van Stiphout K, Perkisas T, Bals S, et al. Phase formation in intermixed Ni-Ge thin films: influence of Ge content and low-temperature nucleation of hexagonal nickel germanides. MICROELECTRONIC ENGINEERING. 2014;120:168–73.
MLA
De Schutter, Bob, Wouter Devulder, A Schrauwen, et al. “Phase Formation in Intermixed Ni-Ge Thin Films: Influence of Ge Content and Low-temperature Nucleation of Hexagonal Nickel Germanides.” MICROELECTRONIC ENGINEERING 120 (2014): 168–173. Print.
@article{5647913,
  author       = {De Schutter, Bob and Devulder, Wouter and Schrauwen, A and van Stiphout, K and Perkisas, T and Bals, S and Vantomme, A and Detavernier, Christophe},
  issn         = {0167-9317},
  journal      = {MICROELECTRONIC ENGINEERING},
  language     = {eng},
  pages        = {168--173},
  title        = {Phase formation in intermixed Ni-Ge thin films: influence of Ge content and low-temperature nucleation of hexagonal nickel germanides},
  url          = {http://dx.doi.org/10.1016/j.mee.2013.09.004},
  volume       = {120},
  year         = {2014},
}

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