Advanced search
1 file | 117.09 KB

Observation of hysteresis in a non-reactive magnetron discharge

Jan Musschoot (UGent) , Diederik Depla (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)
Author
Organization
Abstract
Current-voltage (I-V) characteristics of a rotatable cylindrical magnetron were measured. The balancing of the magnetic field was varied by changing the height of the central magnets. At a certain level of unbalancing, the discharge current displayed bistable behavior with respect to the discharge voltage. The state of the system depended on its history and the argon pressure. This could be attributed to a negative differential resistance of the discharge. A simple model is used to interpret the results. The observed behavior might compromise process stability of large area coaters when a high energy flux to the substrate is mandatory.

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 117.09 KB

Citation

Please use this url to cite or link to this publication:

Chicago
Musschoot, Jan, Diederik Depla, Johan Haemers, and Roger De Gryse. 2008. “Observation of Hysteresis in a Non-reactive Magnetron Discharge.” Plasma Sources Science and Technology 17 (1): 015010.
APA
Musschoot, J., Depla, D., Haemers, J., & De Gryse, R. (2008). Observation of hysteresis in a non-reactive magnetron discharge. Plasma Sources Science and Technology, 17(1), 015010.
Vancouver
1.
Musschoot J, Depla D, Haemers J, De Gryse R. Observation of hysteresis in a non-reactive magnetron discharge. Plasma Sources Science and Technology. 2008;17(1):015010.
MLA
Musschoot, Jan, Diederik Depla, Johan Haemers, et al. “Observation of Hysteresis in a Non-reactive Magnetron Discharge.” Plasma Sources Science and Technology 17.1 (2008): 015010. Print.
@article{525085,
  abstract     = {Current-voltage (I-V) characteristics of a rotatable cylindrical magnetron were measured. The balancing of the magnetic field was varied by changing the height of the central magnets. At a certain level of unbalancing, the discharge current displayed bistable behavior with respect to the discharge voltage. The state of the system depended on its history and the argon pressure. This could be attributed to a negative differential resistance of the discharge. A simple model is used to interpret the results. The observed behavior might compromise process stability of large area coaters when a high energy flux to the substrate is mandatory.},
  author       = {Musschoot, Jan and Depla, Diederik and Haemers, Johan and De Gryse, Roger},
  issn         = {0963-0252},
  journal      = {Plasma Sources Science and Technology},
  language     = {eng},
  number       = {1},
  title        = {Observation of hysteresis in a non-reactive magnetron discharge},
  url          = {http://dx.doi.org/10.1088/0963-0252/17/1/015010},
  volume       = {17},
  year         = {2008},
}

Altmetric
View in Altmetric
Web of Science
Times cited: