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Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films

Author
Organization
Abstract
The morphological stability of NiSi is investigated when 40% of Si is mixed into an as deposited 10 nm Ni film. When annealing at 3 °C/s, scanning electron microscopy images and in situ sheet-resistance measurements show that NiSi agglomeration is delayed by more than 100 °C. In situ x-ray diffraction reveals that NiSi grows from an unusual transient hexagonal theta-nickel-silicide phase. The significant improvement of the NiSi film's morphological stability can be related to its microstructure, with large grains and a strong texture. This peculiar microstructure is compared to the microstructure of the theta-nickel-silicide precursor by electron backscattering diffraction and pole figures.
Keywords
electron backscattering, X-ray diffraction, annealing, electron diffraction, grain size, metallic thin films, nickel alloys, texture, silicon alloys, scanning electron microscopy

Citation

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MLA
Van Bockstael, Charlotte, et al. “Influence of a Transient Hexagonal Phase on the Microstructure and Morphological Stability of NiSi Films.” Applied Physics Letters, vol. 94, no. 3, 2009, doi:10.1063/1.3073750.
APA
Van Bockstael, C., De Keyser, K., Van Meirhaeghe, R., Detavernier, C., Jordan-Sweet, J., & Lavoie, C. (2009). Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films. Applied Physics Letters, 94(3). https://doi.org/10.1063/1.3073750
Chicago author-date
Van Bockstael, Charlotte, Koen De Keyser, Roland Van Meirhaeghe, Christophe Detavernier, Jean Jordan-Sweet, and Christian Lavoie. 2009. “Influence of a Transient Hexagonal Phase on the Microstructure and Morphological Stability of NiSi Films.” Applied Physics Letters 94 (3). https://doi.org/10.1063/1.3073750.
Chicago author-date (all authors)
Van Bockstael, Charlotte, Koen De Keyser, Roland Van Meirhaeghe, Christophe Detavernier, Jean Jordan-Sweet, and Christian Lavoie. 2009. “Influence of a Transient Hexagonal Phase on the Microstructure and Morphological Stability of NiSi Films.” Applied Physics Letters 94 (3). doi:10.1063/1.3073750.
Vancouver
1.
Van Bockstael C, De Keyser K, Van Meirhaeghe R, Detavernier C, Jordan-Sweet J, Lavoie C. Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films. Applied Physics Letters. 2009;94(3).
IEEE
[1]
C. Van Bockstael, K. De Keyser, R. Van Meirhaeghe, C. Detavernier, J. Jordan-Sweet, and C. Lavoie, “Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films,” Applied Physics Letters, vol. 94, no. 3, 2009.
@article{480492,
  abstract     = {{The morphological stability of NiSi is investigated when 40% of Si is mixed into an as deposited 10 nm Ni film. When annealing at 3 °C/s, scanning electron microscopy images and in situ sheet-resistance measurements show that NiSi agglomeration is delayed by more than 100 °C. In situ x-ray diffraction reveals that NiSi grows from an unusual transient hexagonal theta-nickel-silicide phase. The significant improvement of the NiSi film's morphological stability can be related to its microstructure, with large grains and a strong texture. This peculiar microstructure is compared to the microstructure of the theta-nickel-silicide precursor by electron backscattering diffraction and pole figures.}},
  author       = {{Van Bockstael, Charlotte and De Keyser, Koen and Van Meirhaeghe, Roland and Detavernier, Christophe and Jordan-Sweet, Jean and Lavoie, Christian}},
  issn         = {{0003-6951}},
  journal      = {{Applied Physics Letters}},
  keywords     = {{electron backscattering,X-ray diffraction,annealing,electron diffraction,grain size,metallic thin films,nickel alloys,texture,silicon alloys,scanning electron microscopy}},
  language     = {{eng}},
  number       = {{3}},
  title        = {{Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films}},
  url          = {{http://doi.org/10.1063/1.3073750}},
  volume       = {{94}},
  year         = {{2009}},
}

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