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Using mass spectrometry to gather some insights in the fundamentals of the reactive magnetron sputtering process of Al with O2

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , R Persoons and Diederik Depla (UGent)
(2008) BELVAC NEWS. 24(4). p.3-10
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Citation

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MLA
Leroy, Wouter, et al. “Using Mass Spectrometry to Gather Some Insights in the Fundamentals of the Reactive Magnetron Sputtering Process of Al with O2.” BELVAC NEWS, vol. 24, no. 4, 2008, pp. 3–10.
APA
Leroy, W., Mahieu, S., Persoons, R., & Depla, D. (2008). Using mass spectrometry to gather some insights in the fundamentals of the reactive magnetron sputtering process of Al with O2. BELVAC NEWS, 24(4), 3–10.
Chicago author-date
Leroy, Wouter, Stijn Mahieu, R Persoons, and Diederik Depla. 2008. “Using Mass Spectrometry to Gather Some Insights in the Fundamentals of the Reactive Magnetron Sputtering Process of Al with O2.” BELVAC NEWS 24 (4): 3–10.
Chicago author-date (all authors)
Leroy, Wouter, Stijn Mahieu, R Persoons, and Diederik Depla. 2008. “Using Mass Spectrometry to Gather Some Insights in the Fundamentals of the Reactive Magnetron Sputtering Process of Al with O2.” BELVAC NEWS 24 (4): 3–10.
Vancouver
1.
Leroy W, Mahieu S, Persoons R, Depla D. Using mass spectrometry to gather some insights in the fundamentals of the reactive magnetron sputtering process of Al with O2. BELVAC NEWS. 2008;24(4):3–10.
IEEE
[1]
W. Leroy, S. Mahieu, R. Persoons, and D. Depla, “Using mass spectrometry to gather some insights in the fundamentals of the reactive magnetron sputtering process of Al with O2,” BELVAC NEWS, vol. 24, no. 4, pp. 3–10, 2008.
@article{445647,
  author       = {{Leroy, Wouter and Mahieu, Stijn and Persoons, R and Depla, Diederik}},
  issn         = {{0773-8838}},
  journal      = {{BELVAC NEWS}},
  language     = {{eng}},
  number       = {{4}},
  pages        = {{3--10}},
  title        = {{Using mass spectrometry to gather some insights in the fundamentals of the reactive magnetron sputtering process of Al with O2}},
  volume       = {{24}},
  year         = {{2008}},
}