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Improved performance of highly multiplexed silicion-on-insulator microring sensor chips by surface structure implementation

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NB-Photonics
Abstract
Silicon-on-insulator microring resonators have proven to be an excellent platform for label-free nanophotonic biosensors. The high index contrast of the silicon-an-insulator platform allows for fabrication of micrometer size sensors and a high degree of multiplexing. To enable robust, low-noise performance of a microring resonator sensor chip in a lab-on-a-chip setting, flood illuminating an array of vertical grating couplers is a promising approach to couple input light into the chip. This technique provides a very high alignment tolerance while at the same time exciting multiple sensors simultaneously for rapid parallel read-out. We demonstrate this technique to obtain a highly multiplexed chip output combined with real time sensor information. However, parasitic reflections on the chip surface can deteriorate the sensor signal and limit the performance. We investigate the use of surface structures to limit these parasitic signals and show a significant improvement of the sensor operation.
Keywords
OPTICAL-FIBER, GRATING COUPLERS, RESONATOR, COMPACT, ARRAYS, photonic biosensor, interference, grating

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Chicago
Werquin, Sam, Diedrik Vermeulen, Arne Goes, Anabelle Van Eeghem, Peter Dubruel, and Peter Bienstman. 2014. “Improved Performance of Highly Multiplexed Silicion-on-insulator Microring Sensor Chips by Surface Structure Implementation.” In Proceedings of SPIE, the International Society for Optical Engineering, ed. Alexander N Cartwright and Dan V Nicolau. Vol. 8954. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
APA
Werquin, S., Vermeulen, D., Goes, A., Van Eeghem, A., Dubruel, P., & Bienstman, P. (2014). Improved performance of highly multiplexed silicion-on-insulator microring sensor chips by surface structure implementation. In A. N. Cartwright & D. V. Nicolau (Eds.), Proceedings of SPIE, the International Society for Optical Engineering (Vol. 8954). Presented at the Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XI, Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
Vancouver
1.
Werquin S, Vermeulen D, Goes A, Van Eeghem A, Dubruel P, Bienstman P. Improved performance of highly multiplexed silicion-on-insulator microring sensor chips by surface structure implementation. In: Cartwright AN, Nicolau DV, editors. Proceedings of SPIE, the International Society for Optical Engineering. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering; 2014.
MLA
Werquin, Sam, Diedrik Vermeulen, Arne Goes, et al. “Improved Performance of Highly Multiplexed Silicion-on-insulator Microring Sensor Chips by Surface Structure Implementation.” Proceedings of SPIE, the International Society for Optical Engineering. Ed. Alexander N Cartwright & Dan V Nicolau. Vol. 8954. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering, 2014. Print.
@inproceedings{4414475,
  abstract     = {Silicon-on-insulator microring resonators have proven to be an excellent platform for label-free nanophotonic biosensors. The high index contrast of the silicon-an-insulator platform allows for fabrication of micrometer size sensors and a high degree of multiplexing. To enable robust, low-noise performance of a microring resonator sensor chip in a lab-on-a-chip setting, flood illuminating an array of vertical grating couplers is a promising approach to couple input light into the chip. This technique provides a very high alignment tolerance while at the same time exciting multiple sensors simultaneously for rapid parallel read-out. We demonstrate this technique to obtain a highly multiplexed chip output combined with real time sensor information. However, parasitic reflections on the chip surface can deteriorate the sensor signal and limit the performance. We investigate the use of surface structures to limit these parasitic signals and show a significant improvement of the sensor operation.},
  articleno    = {89540O},
  author       = {Werquin, Sam and Vermeulen, Diedrik and Goes, Arne and Van Eeghem, Anabelle and Dubruel, Peter and Bienstman, Peter},
  booktitle    = {Proceedings of SPIE, the International Society for Optical Engineering},
  editor       = {Cartwright, Alexander N and Nicolau, Dan V},
  isbn         = {9780819498670},
  issn         = {0277-786X},
  keywords     = {OPTICAL-FIBER,GRATING COUPLERS,RESONATOR,COMPACT,ARRAYS,photonic biosensor,interference,grating},
  language     = {eng},
  location     = {San Francisco, CA, USA},
  pages        = {8},
  publisher    = {SPIE, the International Society for Optical Engineering},
  title        = {Improved performance of highly multiplexed silicion-on-insulator microring sensor chips by surface structure implementation},
  url          = {http://dx.doi.org/10.1117/12.2037266},
  volume       = {8954},
  year         = {2014},
}

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