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In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering

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MLA
Dendooven, Jolien, et al. “In Situ Characterization of ALD in Mesoporous Thin Films by Grazing Incidence Small Angle X-Ray Scattering.” Atomic Layer Deposition, 12th International Conference, Abstracts, 2012.
APA
Dendooven, J., Devloo-Casier, K., Ide, M., Grandfield, K., Ludwig, K. F., Van Der Voort, P., … Detavernier, C. (2012). In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering. Atomic Layer Deposition, 12th International Conference, Abstracts. Presented at the 12th International conference on Atomic Layer Deposition (ALD 2012), Dresden, Germany.
Chicago author-date
Dendooven, Jolien, Kilian Devloo-Casier, Matthias Ide, Kathryn Grandfield, Karl F Ludwig, Pascal Van Der Voort, Sara Bals, and Christophe Detavernier. 2012. “In Situ Characterization of ALD in Mesoporous Thin Films by Grazing Incidence Small Angle X-Ray Scattering.” In Atomic Layer Deposition, 12th International Conference, Abstracts.
Chicago author-date (all authors)
Dendooven, Jolien, Kilian Devloo-Casier, Matthias Ide, Kathryn Grandfield, Karl F Ludwig, Pascal Van Der Voort, Sara Bals, and Christophe Detavernier. 2012. “In Situ Characterization of ALD in Mesoporous Thin Films by Grazing Incidence Small Angle X-Ray Scattering.” In Atomic Layer Deposition, 12th International Conference, Abstracts.
Vancouver
1.
Dendooven J, Devloo-Casier K, Ide M, Grandfield K, Ludwig KF, Van Der Voort P, et al. In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering. In: Atomic Layer Deposition, 12th International conference, Abstracts. 2012.
IEEE
[1]
J. Dendooven et al., “In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering,” in Atomic Layer Deposition, 12th International conference, Abstracts, Dresden, Germany, 2012.
@inproceedings{4360890,
  author       = {{Dendooven, Jolien and Devloo-Casier, Kilian and Ide, Matthias and Grandfield, Kathryn and Ludwig, Karl F and Van Der Voort, Pascal and Bals, Sara and Detavernier, Christophe}},
  booktitle    = {{Atomic Layer Deposition, 12th International conference, Abstracts}},
  language     = {{eng}},
  location     = {{Dresden, Germany}},
  title        = {{In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering}},
  year         = {{2012}},
}