In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering
- Author
- Jolien Dendooven (UGent) , Kilian Devloo-Casier (UGent) , Matthias Ide (UGent) , Kathryn Grandfield, Karl F Ludwig, Pascal Van Der Voort (UGent) , Sara Bals and Christophe Detavernier (UGent)
- Organization
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-4360890
- MLA
- Dendooven, Jolien, et al. “In Situ Characterization of ALD in Mesoporous Thin Films by Grazing Incidence Small Angle X-Ray Scattering.” Atomic Layer Deposition, 12th International Conference, Abstracts, 2012.
- APA
- Dendooven, J., Devloo-Casier, K., Ide, M., Grandfield, K., Ludwig, K. F., Van Der Voort, P., … Detavernier, C. (2012). In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering. Atomic Layer Deposition, 12th International Conference, Abstracts. Presented at the 12th International conference on Atomic Layer Deposition (ALD 2012), Dresden, Germany.
- Chicago author-date
- Dendooven, Jolien, Kilian Devloo-Casier, Matthias Ide, Kathryn Grandfield, Karl F Ludwig, Pascal Van Der Voort, Sara Bals, and Christophe Detavernier. 2012. “In Situ Characterization of ALD in Mesoporous Thin Films by Grazing Incidence Small Angle X-Ray Scattering.” In Atomic Layer Deposition, 12th International Conference, Abstracts.
- Chicago author-date (all authors)
- Dendooven, Jolien, Kilian Devloo-Casier, Matthias Ide, Kathryn Grandfield, Karl F Ludwig, Pascal Van Der Voort, Sara Bals, and Christophe Detavernier. 2012. “In Situ Characterization of ALD in Mesoporous Thin Films by Grazing Incidence Small Angle X-Ray Scattering.” In Atomic Layer Deposition, 12th International Conference, Abstracts.
- Vancouver
- 1.Dendooven J, Devloo-Casier K, Ide M, Grandfield K, Ludwig KF, Van Der Voort P, et al. In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering. In: Atomic Layer Deposition, 12th International conference, Abstracts. 2012.
- IEEE
- [1]J. Dendooven et al., “In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering,” in Atomic Layer Deposition, 12th International conference, Abstracts, Dresden, Germany, 2012.
@inproceedings{4360890, author = {{Dendooven, Jolien and Devloo-Casier, Kilian and Ide, Matthias and Grandfield, Kathryn and Ludwig, Karl F and Van Der Voort, Pascal and Bals, Sara and Detavernier, Christophe}}, booktitle = {{Atomic Layer Deposition, 12th International conference, Abstracts}}, language = {{eng}}, location = {{Dresden, Germany}}, title = {{In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering}}, year = {{2012}}, }