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Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing

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THIN-FILMS, ATOMIC LAYER DEPOSITION, PHOTOCATALYTIC APPLICATIONS, ZINC-OXIDE, DIOXIDE, GROWTH

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Citation

Please use this url to cite or link to this publication:

Chicago
Deng, Shaoren, Sammy W Verbruggen, Silvia Lenaerts, Johan A Martens, Sven Van den Berghe, Kilian Devloo-Casier, Wouter Devulder, Jolien Dendooven, Davy Deduytsche, and Christophe Detavernier. 2014. “Controllable Nitrogen Doping in as Deposited TiO₂ Film and Its Effect on Post Deposition Annealing.” Journal of Vacuum Science & Technology A 32 (1).
APA
Deng, S., Verbruggen, S. W., Lenaerts, S., Martens, J. A., Van den Berghe, S., Devloo-Casier, K., Devulder, W., et al. (2014). Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 32(1).
Vancouver
1.
Deng S, Verbruggen SW, Lenaerts S, Martens JA, Van den Berghe S, Devloo-Casier K, et al. Controllable nitrogen doping in as deposited TiO₂ film and its effect on post deposition annealing. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 2014;32(1).
MLA
Deng, Shaoren, Sammy W Verbruggen, Silvia Lenaerts, et al. “Controllable Nitrogen Doping in as Deposited TiO₂ Film and Its Effect on Post Deposition Annealing.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 32.1 (2014): n. pag. Print.
@article{4359880,
  articleno    = {01A123},
  author       = {Deng, Shaoren and Verbruggen, Sammy W and Lenaerts, Silvia and Martens, Johan A and Van den Berghe, Sven and Devloo-Casier, Kilian and Devulder, Wouter and Dendooven, Jolien and Deduytsche, Davy and Detavernier, Christophe},
  issn         = {0734-2101},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  language     = {eng},
  number       = {1},
  pages        = {7},
  title        = {Controllable nitrogen doping in as deposited TiO\unmatched{2082} film and its effect on post deposition annealing},
  url          = {http://dx.doi.org/10.1116/1.4847976},
  volume       = {32},
  year         = {2014},
}

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