Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films
- Author
- Sigelinde Van Steenberge, Wouter Leroy (UGent) and Diederik Depla (UGent)
- Organization
- Keywords
- Preferential orientation, Energy per arriving atom, Magnetron sputtering, CeO2 thin films, OXIDE FUEL-CELLS, ELECTRICAL-PROPERTIES, DEPOSITION, TARGET, ELECTROLYTE, COMPONENTS, COATINGS, GROWTH, SENSOR, SOFC
Downloads
-
1306 Sigelinde EMRS final.pdf
- full text
- |
- open access
- |
- |
- 308.04 KB
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-4307076
- MLA
- Van Steenberge, Sigelinde, et al. “Influence of Oxygen Flow and Film Thickness on the Texture and Microstructure of Sputtered Ceria Thin Films.” THIN SOLID FILMS, vol. 553, 2014, pp. 2–6, doi:10.1016/j.tsf.2013.11.049.
- APA
- Van Steenberge, S., Leroy, W., & Depla, D. (2014). Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films. THIN SOLID FILMS, 553, 2–6. https://doi.org/10.1016/j.tsf.2013.11.049
- Chicago author-date
- Van Steenberge, Sigelinde, Wouter Leroy, and Diederik Depla. 2014. “Influence of Oxygen Flow and Film Thickness on the Texture and Microstructure of Sputtered Ceria Thin Films.” THIN SOLID FILMS 553: 2–6. https://doi.org/10.1016/j.tsf.2013.11.049.
- Chicago author-date (all authors)
- Van Steenberge, Sigelinde, Wouter Leroy, and Diederik Depla. 2014. “Influence of Oxygen Flow and Film Thickness on the Texture and Microstructure of Sputtered Ceria Thin Films.” THIN SOLID FILMS 553: 2–6. doi:10.1016/j.tsf.2013.11.049.
- Vancouver
- 1.Van Steenberge S, Leroy W, Depla D. Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films. THIN SOLID FILMS. 2014;553:2–6.
- IEEE
- [1]S. Van Steenberge, W. Leroy, and D. Depla, “Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films,” THIN SOLID FILMS, vol. 553, pp. 2–6, 2014.
@article{4307076, author = {{Van Steenberge, Sigelinde and Leroy, Wouter and Depla, Diederik}}, issn = {{0040-6090}}, journal = {{THIN SOLID FILMS}}, keywords = {{Preferential orientation,Energy per arriving atom,Magnetron sputtering,CeO2 thin films,OXIDE FUEL-CELLS,ELECTRICAL-PROPERTIES,DEPOSITION,TARGET,ELECTROLYTE,COMPONENTS,COATINGS,GROWTH,SENSOR,SOFC}}, language = {{eng}}, pages = {{2--6}}, title = {{Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films}}, url = {{http://doi.org/10.1016/j.tsf.2013.11.049}}, volume = {{553}}, year = {{2014}}, }
- Altmetric
- View in Altmetric
- Web of Science
- Times cited: