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Compact thermally tunable silicon racetrack modulators based on an asymmetric waveguide

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Center for nano- and biophotonics (NB-Photonics)
Abstract
A compact wavelength-tunable 10-Gb/s silicon racetrack modulator with integrated thermo-optic heater is demonstrated by using a waveguide with an asymmetric cross section, combining the compact footprint of microdisk modulators with the design simplicity of regular racetrack or ring modulators. The outer perimeter of the asymmetric racetrack modulator is fully etched to maximize optical confinement, and the inner waveguide edge is shallowly etched to maintain an electrically conductive path to the embedded p-n diode and to control the propagation of the asymmetric optical mode and its coupling to the bus waveguide. The resistive heating elements based on highly doped Si strips are implemented at the outer edge of the modulator for thermo-optic control. The asymmetric modulators can be fabricated along with Si wire waveguides and shallowly etched fiber-grating couplers using a simple process flow involving just two Si-patterning steps. Devices with a bending radius of 10 mu m and a novel "T"-shaped p-n diode layout have been fabricated, and exhibit electro-optic modulation and heater efficiencies of 28 pm/V and 42 pm/mW, respectively. At 10 Gb/s, a stable extinction ratio of 10 dB is demonstrated from a 2V(pp) drive swing, which can be maintained over a wavelength range of 4.6 nm by thermally tuning the modulator. This is equivalent with a temperature variation of about 62 degrees C.
Keywords
MICRORING MODULATOR, Electro-optic modulators, HIGH-SPEED, integrated optics, optical resonators, thermo-optical effects

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Citation

Please use this url to cite or link to this publication:

Chicago
Yu, Hui, M Pantouvaki, Sarvagya Dwivedi, P Verheyen, G Lepage, Roel Baets, Wim Bogaerts, P Absil, and J Van Campenhout. 2013. “Compact Thermally Tunable Silicon Racetrack Modulators Based on an Asymmetric Waveguide.” Ieee Photonics Technology Letters 25 (2): 159–162.
APA
Yu, Hui, Pantouvaki, M., Dwivedi, S., Verheyen, P., Lepage, G., Baets, R., Bogaerts, W., et al. (2013). Compact thermally tunable silicon racetrack modulators based on an asymmetric waveguide. IEEE PHOTONICS TECHNOLOGY LETTERS, 25(2), 159–162.
Vancouver
1.
Yu H, Pantouvaki M, Dwivedi S, Verheyen P, Lepage G, Baets R, et al. Compact thermally tunable silicon racetrack modulators based on an asymmetric waveguide. IEEE PHOTONICS TECHNOLOGY LETTERS. 2013;25(2):159–62.
MLA
Yu, Hui et al. “Compact Thermally Tunable Silicon Racetrack Modulators Based on an Asymmetric Waveguide.” IEEE PHOTONICS TECHNOLOGY LETTERS 25.2 (2013): 159–162. Print.
@article{4240049,
  abstract     = {A compact wavelength-tunable 10-Gb/s silicon racetrack modulator with integrated thermo-optic heater is demonstrated by using a waveguide with an asymmetric cross section, combining the compact footprint of microdisk modulators with the design simplicity of regular racetrack or ring modulators. The outer perimeter of the asymmetric racetrack modulator is fully etched to maximize optical confinement, and the inner waveguide edge is shallowly etched to maintain an electrically conductive path to the embedded p-n diode and to control the propagation of the asymmetric optical mode and its coupling to the bus waveguide. The resistive heating elements based on highly doped Si strips are implemented at the outer edge of the modulator for thermo-optic control. The asymmetric modulators can be fabricated along with Si wire waveguides and shallowly etched fiber-grating couplers using a simple process flow involving just two Si-patterning steps. Devices with a bending radius of 10 mu m and a novel {\textacutedbl}T{\textacutedbl}-shaped p-n diode layout have been fabricated, and exhibit electro-optic modulation and heater efficiencies of 28 pm/V and 42 pm/mW, respectively. At 10 Gb/s, a stable extinction ratio of 10 dB is demonstrated from a 2V(pp) drive swing, which can be maintained over a wavelength range of 4.6 nm by thermally tuning the modulator. This is equivalent with a temperature variation of about 62 degrees C.},
  author       = {Yu, Hui and Pantouvaki, M and Dwivedi, Sarvagya and Verheyen, P and Lepage, G and Baets, Roel and Bogaerts, Wim and Absil, P and Van Campenhout, J},
  issn         = {1041-1135},
  journal      = {IEEE PHOTONICS TECHNOLOGY LETTERS},
  language     = {eng},
  number       = {2},
  pages        = {159--162},
  title        = {Compact thermally tunable silicon racetrack modulators based on an asymmetric waveguide},
  url          = {http://dx.doi.org/10.1109/LPT.2012.2230619},
  volume       = {25},
  year         = {2013},
}

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