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Systematic studies of electrochemical nucleation and growth of copper on Ru-based substrates for damascene process

(2013)
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(UGent)
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Citation

Please use this url to cite or link to this publication:

MLA
Nagar, Magi Margalit. “Systematic Studies of Electrochemical Nucleation and Growth of Copper on Ru-based Substrates for Damascene Process.” 2013 : n. pag. Print.
APA
Nagar, M. M. (2013). Systematic studies of electrochemical nucleation and growth of copper on Ru-based substrates for damascene process. Ghent University. Faculty of Sciences, Ghent, Belgium.
Chicago author-date
Nagar, Magi Margalit. 2013. “Systematic Studies of Electrochemical Nucleation and Growth of Copper on Ru-based Substrates for Damascene Process”. Ghent, Belgium: Ghent University. Faculty of Sciences.
Chicago author-date (all authors)
Nagar, Magi Margalit. 2013. “Systematic Studies of Electrochemical Nucleation and Growth of Copper on Ru-based Substrates for Damascene Process”. Ghent, Belgium: Ghent University. Faculty of Sciences.
Vancouver
1.
Nagar MM. Systematic studies of electrochemical nucleation and growth of copper on Ru-based substrates for damascene process. [Ghent, Belgium]: Ghent University. Faculty of Sciences; 2013.
IEEE
[1]
M. M. Nagar, “Systematic studies of electrochemical nucleation and growth of copper on Ru-based substrates for damascene process,” Ghent University. Faculty of Sciences, Ghent, Belgium, 2013.
@phdthesis{4182436,
  author       = {Nagar, Magi Margalit},
  language     = {eng},
  pages        = {XII, 161},
  publisher    = {Ghent University. Faculty of Sciences},
  school       = {Ghent University},
  title        = {Systematic studies of electrochemical nucleation and growth of copper on Ru-based substrates for damascene process},
  year         = {2013},
}