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Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN

Stijn Mahieu (UGent) , Diederik Depla (UGent) and Roger De Gryse (UGent)
(2008) SURFACE & COATINGS TECHNOLOGY. 202(11). p.2314-2318
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Chicago
Mahieu, Stijn, Diederik Depla, and Roger De Gryse. 2008. “Characterization of the Hardness and the Substrate Fluxes During Reactive Magnetron Sputtering of TiN.” Surface & Coatings Technology 202 (11): 2314–2318.
APA
Mahieu, Stijn, Depla, D., & De Gryse, R. (2008). Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN. SURFACE & COATINGS TECHNOLOGY, 202(11), 2314–2318.
Vancouver
1.
Mahieu S, Depla D, De Gryse R. Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN. SURFACE & COATINGS TECHNOLOGY. 2008;202(11):2314–8.
MLA
Mahieu, Stijn, Diederik Depla, and Roger De Gryse. “Characterization of the Hardness and the Substrate Fluxes During Reactive Magnetron Sputtering of TiN.” SURFACE & COATINGS TECHNOLOGY 202.11 (2008): 2314–2318. Print.
@article{416314,
  author       = {Mahieu, Stijn and Depla, Diederik and De Gryse, Roger},
  issn         = {0257-8972},
  journal      = {SURFACE \& COATINGS TECHNOLOGY},
  language     = {eng},
  number       = {11},
  pages        = {2314--2318},
  title        = {Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN},
  volume       = {202},
  year         = {2008},
}

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