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Discharge voltage measurements during magnetron sputtering

Diederik Depla (UGent) , G BUYLE, Johan Haemers (UGent) and Roger De Gryse (UGent)
(2006) SURFACE & COATINGS TECHNOLOGY. 200(14-15). p.4329-4338
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Chicago
Depla, Diederik, G BUYLE, Johan Haemers, and Roger De Gryse. 2006. “Discharge Voltage Measurements During Magnetron Sputtering.” Surface & Coatings Technology 200 (14-15): 4329–4338.
APA
Depla, D., BUYLE, G., Haemers, J., & De Gryse, R. (2006). Discharge voltage measurements during magnetron sputtering. SURFACE & COATINGS TECHNOLOGY, 200(14-15), 4329–4338.
Vancouver
1.
Depla D, BUYLE G, Haemers J, De Gryse R. Discharge voltage measurements during magnetron sputtering. SURFACE & COATINGS TECHNOLOGY. ELSEVIER SCIENCE SA; 2006;200(14-15):4329–38.
MLA
Depla, Diederik, G BUYLE, Johan Haemers, et al. “Discharge Voltage Measurements During Magnetron Sputtering.” SURFACE & COATINGS TECHNOLOGY 200.14-15 (2006): 4329–4338. Print.
@article{367830,
  author       = {Depla, Diederik and BUYLE, G and Haemers, Johan and De Gryse, Roger},
  issn         = {0257-8972},
  journal      = {SURFACE \& COATINGS TECHNOLOGY},
  language     = {eng},
  number       = {14-15},
  pages        = {4329--4338},
  publisher    = {ELSEVIER SCIENCE SA},
  title        = {Discharge voltage measurements during magnetron sputtering},
  volume       = {200},
  year         = {2006},
}

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