Advanced search

Hysteresis behavior during reactive magnetron sputtering of A(2)O(3) using a rotating cylindrical magnetron

Diederik Depla (UGent) , Johan Haemers (UGent) , G BUYLE and Roger De Gryse (UGent)
Author
Organization

Citation

Please use this url to cite or link to this publication:

Chicago
Depla, Diederik, Johan Haemers, G BUYLE, and Roger De Gryse. 2006. “Hysteresis Behavior During Reactive Magnetron Sputtering of A(2)O(3) Using a Rotating Cylindrical Magnetron.” Journal of Vacuum Science & Technology A 24 (4): 934–938.
APA
Depla, D., Haemers, J., BUYLE, G., & De Gryse, R. (2006). Hysteresis behavior during reactive magnetron sputtering of A(2)O(3) using a rotating cylindrical magnetron. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 24(4), 934–938.
Vancouver
1.
Depla D, Haemers J, BUYLE G, De Gryse R. Hysteresis behavior during reactive magnetron sputtering of A(2)O(3) using a rotating cylindrical magnetron. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. A V S AMER INST PHYSICS; 2006;24(4):934–8.
MLA
Depla, Diederik, Johan Haemers, G BUYLE, et al. “Hysteresis Behavior During Reactive Magnetron Sputtering of A(2)O(3) Using a Rotating Cylindrical Magnetron.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 24.4 (2006): 934–938. Print.
@article{367827,
  author       = {Depla, Diederik and Haemers, Johan and BUYLE, G and De Gryse, Roger},
  issn         = {0734-2101},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  language     = {eng},
  number       = {4},
  pages        = {934--938},
  publisher    = {A V S AMER INST PHYSICS},
  title        = {Hysteresis behavior during reactive magnetron sputtering of A(2)O(3) using a rotating cylindrical magnetron},
  volume       = {24},
  year         = {2006},
}

Web of Science
Times cited: