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Discharge voltage measurements during reactive sputtering of oxides

Diederik Depla (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)
(2006) THIN SOLID FILMS. 515(2). p.468-471
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Chicago
Depla, Diederik, Johan Haemers, and Roger De Gryse. 2006. “Discharge Voltage Measurements During Reactive Sputtering of Oxides.” Thin Solid Films 515 (2): 468–471.
APA
Depla, D., Haemers, J., & De Gryse, R. (2006). Discharge voltage measurements during reactive sputtering of oxides. THIN SOLID FILMS, 515(2), 468–471.
Vancouver
1.
Depla D, Haemers J, De Gryse R. Discharge voltage measurements during reactive sputtering of oxides. THIN SOLID FILMS. ELSEVIER SCIENCE SA; 2006;515(2):468–71.
MLA
Depla, Diederik, Johan Haemers, and Roger De Gryse. “Discharge Voltage Measurements During Reactive Sputtering of Oxides.” THIN SOLID FILMS 515.2 (2006): 468–471. Print.
@article{367813,
  author       = {Depla, Diederik and Haemers, Johan and De Gryse, Roger},
  issn         = {0040-6090},
  journal      = {THIN SOLID FILMS},
  language     = {eng},
  number       = {2},
  pages        = {468--471},
  publisher    = {ELSEVIER SCIENCE SA},
  title        = {Discharge voltage measurements during reactive sputtering of oxides},
  volume       = {515},
  year         = {2006},
}

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