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Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation

Jan Musschoot (UGent) , Diederik Depla (UGent) , G BUYLE, Johan Haemers (UGent) and Roger De Gryse (UGent)
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Chicago
Musschoot, Jan, Diederik Depla, G BUYLE, Johan Haemers, and Roger De Gryse. 2006. “Influence of the Geometrical Configuration on the Plasma Ionization Distribution and Erosion Profile of a Rotating Cylindrical Magnetron: a Monte Carlo Simulation.” Journal of Physics D-applied Physics 39 (18): 3989–3993.
APA
Musschoot, J., Depla, D., BUYLE, G., Haemers, J., & De Gryse, R. (2006). Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 39(18), 3989–3993.
Vancouver
1.
Musschoot J, Depla D, BUYLE G, Haemers J, De Gryse R. Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation. JOURNAL OF PHYSICS D-APPLIED PHYSICS. IOP PUBLISHING LTD; 2006;39(18):3989–93.
MLA
Musschoot, Jan, Diederik Depla, G BUYLE, et al. “Influence of the Geometrical Configuration on the Plasma Ionization Distribution and Erosion Profile of a Rotating Cylindrical Magnetron: a Monte Carlo Simulation.” JOURNAL OF PHYSICS D-APPLIED PHYSICS 39.18 (2006): 3989–3993. Print.
@article{367009,
  author       = {Musschoot, Jan and Depla, Diederik and BUYLE, G and Haemers, Johan and De Gryse, Roger},
  issn         = {0022-3727},
  journal      = {JOURNAL OF PHYSICS D-APPLIED PHYSICS},
  language     = {eng},
  number       = {18},
  pages        = {3989--3993},
  publisher    = {IOP PUBLISHING LTD},
  title        = {Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation},
  volume       = {39},
  year         = {2006},
}

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