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Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons

G BUYLE, Diederik Depla (UGent) , Karin Eufinger (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER
(2005) Society of Vacuum Coaters Technical Conference Proceedings 1991-2005.
Author
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Citation

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MLA
BUYLE, G., et al. “Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons.” Society of Vacuum Coaters Technical Conference Proceedings 1991-2005, Society of Vacuum Coaters, 2005.
APA
BUYLE, G., Depla, D., Eufinger, K., De Gryse, R., & DE BOSSCHER, W. (2005). Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons. Society of Vacuum Coaters Technical Conference Proceedings 1991-2005. Society of Vacuum Coaters.
Chicago author-date
BUYLE, G, Diederik Depla, Karin Eufinger, Roger De Gryse, and W DE BOSSCHER. 2005. “Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons.” In Society of Vacuum Coaters Technical Conference Proceedings 1991-2005. Society of Vacuum Coaters.
Chicago author-date (all authors)
BUYLE, G, Diederik Depla, Karin Eufinger, Roger De Gryse, and W DE BOSSCHER. 2005. “Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons.” In Society of Vacuum Coaters Technical Conference Proceedings 1991-2005. Society of Vacuum Coaters.
Vancouver
1.
BUYLE G, Depla D, Eufinger K, De Gryse R, DE BOSSCHER W. Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons. In: Society of Vacuum Coaters Technical Conference Proceedings 1991-2005. Society of Vacuum Coaters; 2005.
IEEE
[1]
G. BUYLE, D. Depla, K. Eufinger, R. De Gryse, and W. DE BOSSCHER, “Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons,” in Society of Vacuum Coaters Technical Conference Proceedings 1991-2005, 2005.
@inproceedings{366199,
  author       = {{BUYLE, G and Depla, Diederik and Eufinger, Karin and De Gryse, Roger and DE BOSSCHER, W}},
  booktitle    = {{Society of Vacuum Coaters Technical Conference Proceedings 1991-2005}},
  issn         = {{1099-4718}},
  language     = {{und}},
  publisher    = {{Society of Vacuum Coaters}},
  title        = {{Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons}},
  year         = {{2005}},
}