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Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics

Alfons Vervaet (UGent) , Sam Siau, Johan De Baets (UGent) and Boniface Manirambona (UGent)
(2006) APPLIED SURFACE SCIENCE. 252(23). p.8243-8250
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Citation

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MLA
Vervaet, Alfons, et al. “Optimization of Microvia-Technology Using Excimer Laser for Build-up Layer Application in Microelectronics.” APPLIED SURFACE SCIENCE, vol. 252, no. 23, Elsevier Science, 2006, pp. 8243–50.
APA
Vervaet, A., Siau, S., De Baets, J., & Manirambona, B. (2006). Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics. APPLIED SURFACE SCIENCE, 252(23), 8243–8250.
Chicago author-date
Vervaet, Alfons, Sam Siau, Johan De Baets, and Boniface Manirambona. 2006. “Optimization of Microvia-Technology Using Excimer Laser for Build-up Layer Application in Microelectronics.” APPLIED SURFACE SCIENCE 252 (23): 8243–50.
Chicago author-date (all authors)
Vervaet, Alfons, Sam Siau, Johan De Baets, and Boniface Manirambona. 2006. “Optimization of Microvia-Technology Using Excimer Laser for Build-up Layer Application in Microelectronics.” APPLIED SURFACE SCIENCE 252 (23): 8243–8250.
Vancouver
1.
Vervaet A, Siau S, De Baets J, Manirambona B. Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics. APPLIED SURFACE SCIENCE. 2006;252(23):8243–50.
IEEE
[1]
A. Vervaet, S. Siau, J. De Baets, and B. Manirambona, “Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics,” APPLIED SURFACE SCIENCE, vol. 252, no. 23, pp. 8243–8250, 2006.
@article{365374,
  author       = {{Vervaet, Alfons and Siau, Sam and De Baets, Johan and Manirambona, Boniface}},
  issn         = {{0169-4332}},
  journal      = {{APPLIED SURFACE SCIENCE}},
  language     = {{eng}},
  number       = {{23}},
  pages        = {{8243--8250}},
  publisher    = {{Elsevier Science}},
  title        = {{Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics}},
  volume       = {{252}},
  year         = {{2006}},
}
Web of Science
Times cited: