Advanced search
Add to list

Development of high power magnetron sputtering targets prepared by flame spraying

Author
Organization
Abstract
To achieve a cost effective process for the deposition of YBCO thin films using magnetron sputtering, it is imperative to reach the highest deposition rate possible. This study describes the development of high power YBCO targets by flame spraying. The YBCO was doped with Ag to increase the electrical and thermal conductivity. The spray drying technique was used for the preparation of dedicated powder material, containing the appropriate amounts of Y, Ba, Cu and Ag. Thermal analysis, SEM and XRD were used to analyse phase composition and thermal and electrical characteristics were compared for different amounts of Ag added. The optimal particle size and distribution for flame spraying were obtained using spray drying by adjusting the spray parameters, the concentration and composition of the sprayed solutions and slurries and the spraying parameters. Test samples were made by flame spraying spray dried CuO and YBCO powder with a particle size of 40-60 micron onto a stainless steel substrate.

Citation

Please use this url to cite or link to this publication:

MLA
Van Driessche, Isabel, R CAROLISSEN, G VANHOYLAND, et al. “Development of High Power Magnetron Sputtering Targets Prepared by Flame Spraying.” APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2 158 (1997): 141–144. Print.
APA
Van Driessche, I., CAROLISSEN, R., VANHOYLAND, G., & Hoste, S. (1997). Development of high power magnetron sputtering targets prepared by flame spraying. APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2, (158), 141–144.
Chicago author-date
Van Driessche, Isabel, R CAROLISSEN, G VANHOYLAND, and Serge Hoste. 1997. “Development of High Power Magnetron Sputtering Targets Prepared by Flame Spraying.” APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2 (158): 141–144.
Chicago author-date (all authors)
Van Driessche, Isabel, R CAROLISSEN, G VANHOYLAND, and Serge Hoste. 1997. “Development of High Power Magnetron Sputtering Targets Prepared by Flame Spraying.” APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2 (158): 141–144.
Vancouver
1.
Van Driessche I, CAROLISSEN R, VANHOYLAND G, Hoste S. Development of high power magnetron sputtering targets prepared by flame spraying. APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2. IOP PUBLISHING LTD; 1997;(158):141–4.
IEEE
[1]
I. Van Driessche, R. CAROLISSEN, G. VANHOYLAND, and S. Hoste, “Development of high power magnetron sputtering targets prepared by flame spraying,” APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2, no. 158, pp. 141–144, 1997.
@article{361064,
  abstract     = {To achieve a cost effective process for the deposition of YBCO thin films using magnetron sputtering, it is imperative to reach the highest deposition rate possible. This study describes the development of high power YBCO targets by flame spraying. The YBCO was doped with Ag to increase the electrical and thermal conductivity. The spray drying technique was used for the preparation of dedicated powder material, containing the appropriate amounts of Y, Ba, Cu and Ag. Thermal analysis, SEM and XRD were used to analyse phase composition and thermal and electrical characteristics were compared for different amounts of Ag added. The optimal particle size and distribution for flame spraying were obtained using spray drying by adjusting the spray parameters, the concentration and composition of the sprayed solutions and slurries and the spraying parameters. Test samples were made by flame spraying spray dried CuO and YBCO powder with a particle size of 40-60 micron onto a stainless steel substrate.},
  author       = {Van Driessche, Isabel and CAROLISSEN, R and VANHOYLAND, G and Hoste, Serge},
  issn         = {0951-3248},
  journal      = {APPLIED SUPERCONDUCTIVITY 1997, VOLS 1 AND 2},
  language     = {eng},
  number       = {158},
  pages        = {141--144},
  publisher    = {IOP PUBLISHING LTD},
  title        = {Development of high power magnetron sputtering targets prepared by flame spraying},
  year         = {1997},
}

Web of Science
Times cited: