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Determination of oxide precipitate phase and morphology in silicon and germanium using infra-red absorption spectroscopy

Olivier De Gryse, Jan Vanhellemont (UGent) and Paul Clauws (UGent)
(2006) MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. 9(1-3). p.246-251
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MLA
De Gryse, Olivier, Jan Vanhellemont, and Paul Clauws. “Determination of Oxide Precipitate Phase and Morphology in Silicon and Germanium Using Infra-red Absorption Spectroscopy.” MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 9.1-3 (2006): 246–251. Print.
APA
De Gryse, Olivier, Vanhellemont, J., & Clauws, P. (2006). Determination of oxide precipitate phase and morphology in silicon and germanium using infra-red absorption spectroscopy. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 9(1-3), 246–251.
Chicago author-date
De Gryse, Olivier, Jan Vanhellemont, and Paul Clauws. 2006. “Determination of Oxide Precipitate Phase and Morphology in Silicon and Germanium Using Infra-red Absorption Spectroscopy.” Materials Science in Semiconductor Processing 9 (1-3): 246–251.
Chicago author-date (all authors)
De Gryse, Olivier, Jan Vanhellemont, and Paul Clauws. 2006. “Determination of Oxide Precipitate Phase and Morphology in Silicon and Germanium Using Infra-red Absorption Spectroscopy.” Materials Science in Semiconductor Processing 9 (1-3): 246–251.
Vancouver
1.
De Gryse O, Vanhellemont J, Clauws P. Determination of oxide precipitate phase and morphology in silicon and germanium using infra-red absorption spectroscopy. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. ELSEVIER SCI LTD; 2006;9(1-3):246–51.
IEEE
[1]
O. De Gryse, J. Vanhellemont, and P. Clauws, “Determination of oxide precipitate phase and morphology in silicon and germanium using infra-red absorption spectroscopy,” MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, vol. 9, no. 1–3, pp. 246–251, 2006.
@article{345223,
  author       = {De Gryse, Olivier and Vanhellemont, Jan and Clauws, Paul},
  issn         = {1369-8001},
  journal      = {MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING},
  language     = {eng},
  number       = {1-3},
  pages        = {246--251},
  publisher    = {ELSEVIER SCI LTD},
  title        = {Determination of oxide precipitate phase and morphology in silicon and germanium using infra-red absorption spectroscopy},
  volume       = {9},
  year         = {2006},
}
Web of Science
Times cited: