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Prototyping micro-optical components with integrated out-of-plane coupling structures using deep lithography with protons: art. no. 618504

Jurgen Van Erps, Lawrence Bogaert, Bart Volckaerts, Christof Debaes and Hugo Thienpont UGent (2006) Proceedings of the society of photo-optical instrumentation engineers (SPIE). 6185. p.18504-18504
abstract
We present Deep Lithography with Protons (DLP) as a rapid prototyping technology to fabricate waveguide-based micro-optical components with monolithically integrated 45 degrees micro-mirrors acting as out-of-plane couplers, splitting the optical signal in 3 separated paths. For the first time, two different proton beam sizes are used during one irradiation and a 20 mu m collimating aperture is chosen to accurately define the out-of-plane coupling structures. We fully optimized the DLP process for this 20 mu m proton beam and we measured the surface roughness (R-q=27.5nm) and the flatness (R-t=3.17 mu m) of the realized components. Finally, we experimentally measured the optical transmission efficiency of the micro-optical splitter component. The results are in excellent agreement with non-sequential ray-tracing simulations performed for the design. Above that, we present a pluggable out-of-plane coupler incorporating a single micro-mirror for the 90 degrees coupling of light to or from polymer multimode waveguides integrated on a printed circuit board (PCB). This millimeter-sized mass-reproducible component can then be readily inserted into laser ablated cavities. Non-sequential ray-tracing simulations are performed to predict the optical performance of the component, showing coupling efficiencies up to 78%. These results are then experimentally verified using piezo-motorized positioning equipment with submicron accuracy in a multimode fiber-to-fiber coupling scheme, showing coupling efficiencies up to 56%. The fabricated coupling components are suitable for low-cost mass production since our micro-optical prototyping technology is compatible with standard replication techniques, such as hot embossing and injection molding, has been shown before.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (proceedingsPaper)
publication status
published
subject
keyword
INTERCONNECTIONS, WAVE-GUIDE, MIRRORS, Deep Lithography with Protons (DLP), micro-optics, optical interconnect, out-of-plane coupling, passive optical splitters, polymer multimode waveguides
in
Proceedings of the society of photo-optical instrumentation engineers (SPIE)
editor
H Thienpont, MR Taghizadeh, P Daele and J Mohr
volume
6185
issue title
Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration
article number
618504
pages
18504 - 18504
publisher
Spie
place of publication
Bellingham, WA, USA
conference name
Conference on Micro-Optics, VCSELs, and Photonic Interconnects II
conference location
Strasbourg, France
conference start
2006-04-03
conference end
2006-04-05
Web of Science type
Proceedings Paper
Web of Science id
000239001400009
ISSN
0277-786X
ISBN
0819462411
DOI
10.1117/12.663372
language
English
UGent publication?
yes
classification
P1
copyright statement
I have transferred the copyright for this publication to the publisher
id
331619
handle
http://hdl.handle.net/1854/LU-331619
date created
2006-04-18 11:23:00
date last changed
2017-01-02 09:52:47
@inproceedings{331619,
  abstract     = {We present Deep Lithography with Protons (DLP) as a rapid prototyping technology to fabricate waveguide-based micro-optical components with monolithically integrated 45 degrees micro-mirrors acting as out-of-plane couplers, splitting the optical signal in 3 separated paths. For the first time, two different proton beam sizes are used during one irradiation and a 20 mu m collimating aperture is chosen to accurately define the out-of-plane coupling structures. We fully optimized the DLP process for this 20 mu m proton beam and we measured the surface roughness (R-q=27.5nm) and the flatness (R-t=3.17 mu m) of the realized components. Finally, we experimentally measured the optical transmission efficiency of the micro-optical splitter component. The results are in excellent agreement with non-sequential ray-tracing simulations performed for the design. Above that, we present a pluggable out-of-plane coupler incorporating a single micro-mirror for the 90 degrees coupling of light to or from polymer multimode waveguides integrated on a printed circuit board (PCB). This millimeter-sized mass-reproducible component can then be readily inserted into laser ablated cavities. Non-sequential ray-tracing simulations are performed to predict the optical performance of the component, showing coupling efficiencies up to 78\%. These results are then experimentally verified using piezo-motorized positioning equipment with submicron accuracy in a multimode fiber-to-fiber coupling scheme, showing coupling efficiencies up to 56\%. The fabricated coupling components are suitable for low-cost mass production since our micro-optical prototyping technology is compatible with standard replication techniques, such as hot embossing and injection molding, has been shown before.},
  articleno    = {618504},
  author       = {Van Erps, Jurgen and Bogaert, Lawrence and Volckaerts, Bart and Debaes, Christof and Thienpont, Hugo},
  booktitle    = {Proceedings of the society of photo-optical instrumentation engineers (SPIE)},
  editor       = {Thienpont, H and Taghizadeh, MR and Daele, P and Mohr, J},
  isbn         = {0819462411},
  issn         = {0277-786X},
  keyword      = {INTERCONNECTIONS,WAVE-GUIDE,MIRRORS,Deep Lithography with Protons (DLP),micro-optics,optical interconnect,out-of-plane coupling,passive optical splitters,polymer multimode waveguides},
  language     = {eng},
  location     = {Strasbourg, France},
  pages        = {618504:18504--618504:18504},
  publisher    = {Spie},
  title        = {Prototyping micro-optical components with integrated out-of-plane coupling structures using deep lithography with protons: art. no. 618504},
  url          = {http://dx.doi.org/10.1117/12.663372},
  volume       = {6185},
  year         = {2006},
}

Chicago
Van Erps, Jurgen, Lawrence Bogaert, Bart Volckaerts, Christof Debaes, and Hugo Thienpont. 2006. “Prototyping Micro-optical Components with Integrated Out-of-plane Coupling Structures Using Deep Lithography with Protons: Art. No. 618504.” In Proceedings of the Society of Photo-optical Instrumentation Engineers (SPIE), ed. H Thienpont, MR Taghizadeh, P Daele, and J Mohr, 6185:18504–18504. Bellingham, WA, USA: Spie.
APA
Van Erps, Jurgen, Bogaert, L., Volckaerts, B., Debaes, C., & Thienpont, H. (2006). Prototyping micro-optical components with integrated out-of-plane coupling structures using deep lithography with protons: art. no. 618504. In H Thienpont, M. Taghizadeh, P. Daele, & J. Mohr (Eds.), Proceedings of the society of photo-optical instrumentation engineers (SPIE) (Vol. 6185, pp. 18504–18504). Presented at the Conference on Micro-Optics, VCSELs, and Photonic Interconnects II, Bellingham, WA, USA: Spie.
Vancouver
1.
Van Erps J, Bogaert L, Volckaerts B, Debaes C, Thienpont H. Prototyping micro-optical components with integrated out-of-plane coupling structures using deep lithography with protons: art. no. 618504. In: Thienpont H, Taghizadeh M, Daele P, Mohr J, editors. Proceedings of the society of photo-optical instrumentation engineers (SPIE). Bellingham, WA, USA: Spie; 2006. p. 18504–18504.
MLA
Van Erps, Jurgen, Lawrence Bogaert, Bart Volckaerts, et al. “Prototyping Micro-optical Components with Integrated Out-of-plane Coupling Structures Using Deep Lithography with Protons: Art. No. 618504.” Proceedings of the Society of Photo-optical Instrumentation Engineers (SPIE). Ed. H Thienpont et al. Vol. 6185. Bellingham, WA, USA: Spie, 2006. 18504–18504. Print.