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Monte Carlo simulation of the transport of atoms in DC magnetron sputtering

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MLA
Mahieu, Stijn, Guy Buyle, Diederik Depla, et al. “Monte Carlo Simulation of the Transport of Atoms in DC Magnetron Sputtering.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 243.2 (2006): 313–319. Print.
APA
Mahieu, Stijn, Buyle, G., Depla, D., Heirwegh, S., Ghekiere, P., & De Gryse, R. (2006). Monte Carlo simulation of the transport of atoms in DC magnetron sputtering. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 243(2), 313–319.
Chicago author-date
Mahieu, Stijn, Guy Buyle, Diederik Depla, Sarah Heirwegh, Pieter Ghekiere, and Roger De Gryse. 2006. “Monte Carlo Simulation of the Transport of Atoms in DC Magnetron Sputtering.” Nuclear Instruments & Methods in Physics Research Section B-beam Interactions with Materials and Atoms 243 (2): 313–319.
Chicago author-date (all authors)
Mahieu, Stijn, Guy Buyle, Diederik Depla, Sarah Heirwegh, Pieter Ghekiere, and Roger De Gryse. 2006. “Monte Carlo Simulation of the Transport of Atoms in DC Magnetron Sputtering.” Nuclear Instruments & Methods in Physics Research Section B-beam Interactions with Materials and Atoms 243 (2): 313–319.
Vancouver
1.
Mahieu S, Buyle G, Depla D, Heirwegh S, Ghekiere P, De Gryse R. Monte Carlo simulation of the transport of atoms in DC magnetron sputtering. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. Elsevier Science; 2006;243(2):313–9.
IEEE
[1]
S. Mahieu, G. Buyle, D. Depla, S. Heirwegh, P. Ghekiere, and R. De Gryse, “Monte Carlo simulation of the transport of atoms in DC magnetron sputtering,” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, vol. 243, no. 2, pp. 313–319, 2006.
@article{329113,
  author       = {Mahieu, Stijn and Buyle, Guy and Depla, Diederik and Heirwegh, Sarah and Ghekiere, Pieter and De Gryse, Roger},
  issn         = {0168-583X},
  journal      = {NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS},
  language     = {eng},
  number       = {2},
  pages        = {313--319},
  publisher    = {Elsevier Science},
  title        = {Monte Carlo simulation of the transport of atoms in DC magnetron sputtering},
  volume       = {243},
  year         = {2006},
}

Web of Science
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