Monte Carlo simulation of the transport of atoms in DC magnetron sputtering
- Author
- Stijn Mahieu (UGent) , Guy Buyle, Diederik Depla (UGent) , Sarah Heirwegh, Pieter Ghekiere and Roger De Gryse (UGent)
- Organization
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-329113
- MLA
- Mahieu, Stijn, et al. “Monte Carlo Simulation of the Transport of Atoms in DC Magnetron Sputtering.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, vol. 243, no. 2, Elsevier Science, 2006, pp. 313–19.
- APA
- Mahieu, S., Buyle, G., Depla, D., Heirwegh, S., Ghekiere, P., & De Gryse, R. (2006). Monte Carlo simulation of the transport of atoms in DC magnetron sputtering. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 243(2), 313–319.
- Chicago author-date
- Mahieu, Stijn, Guy Buyle, Diederik Depla, Sarah Heirwegh, Pieter Ghekiere, and Roger De Gryse. 2006. “Monte Carlo Simulation of the Transport of Atoms in DC Magnetron Sputtering.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 243 (2): 313–19.
- Chicago author-date (all authors)
- Mahieu, Stijn, Guy Buyle, Diederik Depla, Sarah Heirwegh, Pieter Ghekiere, and Roger De Gryse. 2006. “Monte Carlo Simulation of the Transport of Atoms in DC Magnetron Sputtering.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 243 (2): 313–319.
- Vancouver
- 1.Mahieu S, Buyle G, Depla D, Heirwegh S, Ghekiere P, De Gryse R. Monte Carlo simulation of the transport of atoms in DC magnetron sputtering. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 2006;243(2):313–9.
- IEEE
- [1]S. Mahieu, G. Buyle, D. Depla, S. Heirwegh, P. Ghekiere, and R. De Gryse, “Monte Carlo simulation of the transport of atoms in DC magnetron sputtering,” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, vol. 243, no. 2, pp. 313–319, 2006.
@article{329113,
author = {{Mahieu, Stijn and Buyle, Guy and Depla, Diederik and Heirwegh, Sarah and Ghekiere, Pieter and De Gryse, Roger}},
issn = {{0168-583X}},
journal = {{NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS}},
language = {{eng}},
number = {{2}},
pages = {{313--319}},
publisher = {{Elsevier Science}},
title = {{Monte Carlo simulation of the transport of atoms in DC magnetron sputtering}},
volume = {{243}},
year = {{2006}},
}