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Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering

(2006) SURFACE & COATINGS TECHNOLOGY. 200(8). p.2764-2768
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MLA
Mahieu, Stijn, et al. “Biaxially Aligned Titanium Nitride Thin Films Deposited by Reactive Unbalanced Magnetron Sputtering.” SURFACE & COATINGS TECHNOLOGY, vol. 200, no. 8, ELSEVIER SCIENCE SA, 2006, pp. 2764–68.
APA
Mahieu, S., Ghekiere, P., De Winter, G., De Gryse, R., Depla, D., VAN TENDELOO, G., & LEBEDEV, O. (2006). Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering. SURFACE & COATINGS TECHNOLOGY, 200(8), 2764–2768.
Chicago author-date
Mahieu, Stijn, Pieter Ghekiere, Griet De Winter, Roger De Gryse, Diederik Depla, G VAN TENDELOO, and OI LEBEDEV. 2006. “Biaxially Aligned Titanium Nitride Thin Films Deposited by Reactive Unbalanced Magnetron Sputtering.” SURFACE & COATINGS TECHNOLOGY 200 (8): 2764–68.
Chicago author-date (all authors)
Mahieu, Stijn, Pieter Ghekiere, Griet De Winter, Roger De Gryse, Diederik Depla, G VAN TENDELOO, and OI LEBEDEV. 2006. “Biaxially Aligned Titanium Nitride Thin Films Deposited by Reactive Unbalanced Magnetron Sputtering.” SURFACE & COATINGS TECHNOLOGY 200 (8): 2764–2768.
Vancouver
1.
Mahieu S, Ghekiere P, De Winter G, De Gryse R, Depla D, VAN TENDELOO G, et al. Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering. SURFACE & COATINGS TECHNOLOGY. 2006;200(8):2764–8.
IEEE
[1]
S. Mahieu et al., “Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering,” SURFACE & COATINGS TECHNOLOGY, vol. 200, no. 8, pp. 2764–2768, 2006.
@article{329108,
  author       = {{Mahieu, Stijn and Ghekiere, Pieter and De Winter, Griet and De Gryse, Roger and Depla, Diederik and VAN TENDELOO, G and LEBEDEV, OI}},
  issn         = {{0257-8972}},
  journal      = {{SURFACE & COATINGS TECHNOLOGY}},
  language     = {{eng}},
  number       = {{8}},
  pages        = {{2764--2768}},
  publisher    = {{ELSEVIER SCIENCE SA}},
  title        = {{Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering}},
  volume       = {{200}},
  year         = {{2006}},
}

Web of Science
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