Applications of synchrotron X-rays in microelectronics industry research
- Author
- JL JORDAN-SWEET, Christophe Detavernier (UGent) , C LAVOIE, PM MOONEY and MF TONEY
- Organization
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-326023
- MLA
- JORDAN-SWEET, JL, et al. “Applications of Synchrotron X-Rays in Microelectronics Industry Research.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, vol. 241, no. 1–4, Elsevier Science, 2005, pp. 247–52.
- APA
- JORDAN-SWEET, J., Detavernier, C., LAVOIE, C., MOONEY, P., & TONEY, M. (2005). Applications of synchrotron X-rays in microelectronics industry research. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 241(1–4), 247–252.
- Chicago author-date
- JORDAN-SWEET, JL, Christophe Detavernier, C LAVOIE, PM MOONEY, and MF TONEY. 2005. “Applications of Synchrotron X-Rays in Microelectronics Industry Research.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 241 (1–4): 247–52.
- Chicago author-date (all authors)
- JORDAN-SWEET, JL, Christophe Detavernier, C LAVOIE, PM MOONEY, and MF TONEY. 2005. “Applications of Synchrotron X-Rays in Microelectronics Industry Research.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 241 (1–4): 247–252.
- Vancouver
- 1.JORDAN-SWEET J, Detavernier C, LAVOIE C, MOONEY P, TONEY M. Applications of synchrotron X-rays in microelectronics industry research. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 2005;241(1–4):247–52.
- IEEE
- [1]J. JORDAN-SWEET, C. Detavernier, C. LAVOIE, P. MOONEY, and M. TONEY, “Applications of synchrotron X-rays in microelectronics industry research,” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, vol. 241, no. 1–4, pp. 247–252, 2005.
@article{326023,
author = {{JORDAN-SWEET, JL and Detavernier, Christophe and LAVOIE, C and MOONEY, PM and TONEY, MF}},
issn = {{0168-583X}},
journal = {{NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS}},
language = {{eng}},
number = {{1-4}},
pages = {{247--252}},
publisher = {{Elsevier Science}},
title = {{Applications of synchrotron X-rays in microelectronics industry research}},
volume = {{241}},
year = {{2005}},
}