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Reactive sputter deposition of Al doped TiOx thin films using titanium targets with aluminium inserts

Bert Braeckman (UGent) , Francis Boydens (UGent) , Diederik Depla (UGent) and Dirk Poelman (UGent)
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Keywords
Thin film deposition, Magnetron sputtering, Reactive sputtering behaviour, YTTRIA-STABILIZED ZIRCONIA, ION-BOMBARDMENT, VOLTAGE MEASUREMENTS, OPTICAL-PROPERTIES, TRANSITION-METALS, ANATASE TIO2, SURFACE, XPS, GAS, REDUCTION

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Citation

Please use this url to cite or link to this publication:

Chicago
Braeckman, Bert, Francis Boydens, Diederik Depla, and Dirk Poelman. 2013. “Reactive Sputter Deposition of Al Doped TiOx Thin Films Using Titanium Targets with Aluminium Inserts.” Journal of Alloys and Compounds 578: 44–49.
APA
Braeckman, Bert, Boydens, F., Depla, D., & Poelman, D. (2013). Reactive sputter deposition of Al doped TiOx thin films using titanium targets with aluminium inserts. JOURNAL OF ALLOYS AND COMPOUNDS, 578, 44–49.
Vancouver
1.
Braeckman B, Boydens F, Depla D, Poelman D. Reactive sputter deposition of Al doped TiOx thin films using titanium targets with aluminium inserts. JOURNAL OF ALLOYS AND COMPOUNDS. 2013;578:44–9.
MLA
Braeckman, Bert, Francis Boydens, Diederik Depla, et al. “Reactive Sputter Deposition of Al Doped TiOx Thin Films Using Titanium Targets with Aluminium Inserts.” JOURNAL OF ALLOYS AND COMPOUNDS 578 (2013): 44–49. Print.
@article{3235618,
  author       = {Braeckman, Bert and Boydens, Francis and Depla, Diederik and Poelman, Dirk},
  issn         = {0925-8388},
  journal      = {JOURNAL OF ALLOYS AND COMPOUNDS},
  keyword      = {Thin film deposition,Magnetron sputtering,Reactive sputtering behaviour,YTTRIA-STABILIZED ZIRCONIA,ION-BOMBARDMENT,VOLTAGE MEASUREMENTS,OPTICAL-PROPERTIES,TRANSITION-METALS,ANATASE TIO2,SURFACE,XPS,GAS,REDUCTION},
  language     = {eng},
  pages        = {44--49},
  title        = {Reactive sputter deposition of Al doped TiOx thin films using titanium targets with aluminium inserts},
  url          = {http://dx.doi.org/10.1016/j.jallcom.2013.05.011},
  volume       = {578},
  year         = {2013},
}

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